Method and device for collecting by-products individually

A device for filtering an airflow accompanied with a byproduct generated in a source during a semiconductor manufacturing process to retain said by-product therein, comprising:

• a body;
• an entrance provided on an upper portion of said body and having a first connection head to be communicated with said source for enabling said airflow to flow into said body;
• a powder trap mounted in said body for filtering said airflow to retain said by-product therein;
• a guiding device mounted between said entrance and said powder trap for guiding said airflow to pass into said powder trap;
• and
• an exit provided on a lower portion of said body and having a second connection head to be in communication with a vacuum system generating said airflow to carry said by-product for enabling said fluid to flow out.

A method for treating a plurality of by-products respectively generated in a corresponding plurality of sources during a semiconductor manufacturing process, comprising steps of:

• providing a corresponding plurality of filtering devices, each of which communicates between a respective source and a respective introducing duct for collecting and separating a respective by-product generated in said respective source from an airflow which carries said respective by-product from said respective source;
• and
• providing a vacuum system connected to said plurality of filtering devices simultaneously for generating said airflow to carry said by-products,
• wherein each of said filtering devices includes:
• a body;
• an entrance provided on an upper portion of said body and having a first connection head in communication with said respective source generating said respective by-product for enabling said airflow to flow into said body;
• a powder trap mounted in said body for filtering said airflow to retain said respective by-product therein;
• a guiding device mounted between said entrance and said powder trap for guiding said airflow to pass said powder trap;
• and
• an exit provided on a lower portion of said body and having a second connection head in communication with said vacuum system for enabling said airflow to flow out.