Method for maximizing the throughput of a multiple-step workstation in a plant
AssigneeVanguard International Semiconductor Corporation
InventorsChun-Yen Kuo, Yirn-Sheng Pan, Horng-Huei Tseng
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AssigneeVanguard International Semiconductor Corporation
InventorsChun-Yen Kuo, Yirn-Sheng Pan, Horng-Huei Tseng
Estimating the term…
A method for maximizing the throughput of a multiple-step workstation in a plant includes forming an interrecipe delay time array having rows of delay times for a plurality of lots L.sub.n with a plurality of recipes R.sub.n caused by a lot L.sub.n-1 with a recipe R.sub.n-1 for n=1 to a, and columns of delay times for a recipe LR.sub.n caused by a plurality of recipes LR.sub.n-1 for n=1 to a. An array of feasible recipe-to-recipe sequences S(n,m) is then formed having rows of feasible recipe-to-recipe sequences for the lot L.sub.n in a plurality of orders O.sub.m for m=1 to a, and columns of feasible recipe-to-recipe sequences for a plurality of lots L.sub.n in the order O.sub.m for m=1 to a. A recipe-to-recipe sequence in an order that is selected to be processed has a value of 1, and all other sequences in that order have a value of 0. Subsequently, a lot-recipe mapping array is formed that maps a recipe to be used for each lot. An objective function and a constraint function are formed, and may be typical linear programming functions. The objective function is solved subject to the constraint function using an integer programming solver to yield solution sets of recipe-to-recipe sequences having a value of 1. Finally, an optimal process of recipe-to-recipe sequences is formed from lots with minimum total delay times for orders O.sub.1 through O.sub.m.
A method for maximizing throughput of a multiple-step workstation in a plant, the workstation having a waiting pool buffer of lots waiting to be processed by the workstation, an nth lot L.sub.n in the waiting pool having a process time PT.sub.n and using a recipe R.sub.n, wherein a delay time DT.sub.n is the time the lot L.sub.n is waiting to be processed due to a preceding lot L.sub.n-1 being processed, the lot L.sub.n not being processed or not being in transit between process steps during the delay time DT.sub.n, n being an integer greater than zero, said method comprising:
A method for maximizing throughput of a multiple-step workstation in a plant, the workstation having a waiting pool buffer of lots waiting to be processed by the workstation, an nth lot L.sub.n in the waiting pool having a process time PT.sub.n and using a recipe R.sub.n, wherein a delay time DT.sub.n is the time the lot L.sub.n is waiting to be processed due to a preceding lot L.sub.n-1 being processed, the lot L.sub.n not being processed or not being in transit between process steps during the delay time DT.sub.n, n being an integer greater than zero, said method comprising:
Dependencies are inferred from the claim text.