Method and system for anomaly detection
AssigneeTexas Instruments Incorporated
InventorsYouLing Lin, A. Kathleen Hennessey, Ramakrishna Pattikonda, Veera S. Khaja, Rajasekar Reddy
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AssigneeTexas Instruments Incorporated
InventorsYouLing Lin, A. Kathleen Hennessey, Ramakrishna Pattikonda, Veera S. Khaja, Rajasekar Reddy
Estimating the term…
A system and method for detecting anomalies on a manufactured device includes or utilizes a moveable stage for holding and positioning the device, a camera for capturing an image of the device on the stage, a digitizer coupled to the camera for producing a digital-pixel-based representation of the image, and a computer having a processor and memory. The computer is coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device. The computer is programmed to be operable to symbolically decompose a digital-pixel-based representation of an image to create a primitive-based representation of the image. The image may be aligned by the computer with respect to the rotation of geometric objects in the image by developing a histogram of angles and lengths and matching them to determine a rotational shift.
A system for detecting anomalies on a semiconductor wafer, the system comprising:
A system for detecting anomalies on a manufactured device, the system comprising:
A method for detecting anomalies on a manufactured device, the system comprising:
Dependencies are inferred from the claim text.