Fluid storage and dispensing system

A method for storage and dispensing of a fluid, comprising:

• containing the fluid in a confined state against a multi-stage fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator, without flow control means between said fluid and said fluid pressure regulator;
• and
• selectively dispensing the confined fluid by opening the fluid flow path to fluid flow downstream of the fluid pressure regulator, and discharging fluid at a rate determined by the fluid pressure regulator.

A fluid storage and dispensing system comprising a vessel containing a physical adsorbent material having adsorbed thereon a gas at an internal pressure in the vessel of from about 50 psig to about 5000 psig, said vessel including a fluid flow port, with a fluid pressure regulator associated with the port, and a gas dispensing assembly coupled with the vessel and selectively operable to dispense gas from the vessel, with the fluid pressure regulator and gas dispensing assembly being arranged such that gas dispensed from the vessel flows through the fluid pressure regulator prior to flow through the gas dispensing assembly.

A semiconductor manufacturing system comprising a semiconductor manufacturing apparatus utilizing a gas, and a source of said gas, wherein said source comprises a vessel containing a physical adsorbent material having adsorbed thereon a gas at an internal pressure in the vessel of from about 50 psig to about 5000 psig, said vessel having a fluid pressure regulator associated therewith, and a gas dispensing assembly coupled with the vessel and selectively operable to dispense gas from the vessel, wherein the fluid pressure regulator and fluid dispensing assembly are arranged such that fluid dispensed from the vessel flows through the fluid pressure regulator prior to flow through the fluid dispensing assembly.

A method for storage and dispensing of a fluid, comprising:

• containing the fluid in an at least partially adsorbed state at a pressure in the range of from about 50 to about 5000 psig, in a vessel having a fluid pressure regulator associated therewith and joined in fluid flow communication with a fluid dispensing assembly, wherein the fluid pressure regulator and fluid dispensing assembly are arranged such that fluid dispensed from the vessel flows through the fluid pressure regulator prior to flow through the fluid dispensing assembly;
• and
• selectively dispensing the fluid by desorbing same from the adsorbed state releasing same from containment for flow through the fluid pressure regulator prior to flow through the fluid dispensing assembly.

A fluid storage and dispensing vessel comprising a 2.0-2.25 liter DOT 3AA 2015 cylinder with a 1.5 inch NGT opening with a 11/2-111/2 NGT thread, a 4.187 to 4.25 inch outer diameter, a nominal wall thickness of 0.094 to 0.125 inch, and a length of 12.75 to 13.75 inches.

A fluid storage and dispensing assembly comprising a vessel with an interior volume less than 50 liters and a >1 inch NGT neck opening, a dispensing assembly coupled to the neck opening, a regulator coupled to the dispensing assembly and disposed in the interior volume of the vessel.

A method for storage and dispensing of a fluid, comprising:

• containing the fluid in a confined state against a multi-stage fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator, wherein the fluid is contained in a vessel in which the multi-stage fluid pressure regulator is at least partially interiorly disposed;
• and
• selectively dispensing the confined fluid by opening the fluid flow path to fluid flow downstream of the fluid pressure regulator, and discharging fluid at a rate determined by the fluid pressure regulator.