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US 6,088,505 AGranted
Holographic patterning method and tool for production environments
AssigneeHolographic Lithography Systems, Inc.
InventorDouglas S. Hobbs
Life of this patent
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Abstract
A high resolution, high-throughout, large field size, production environment, lithographic tool system and method includes an interferometric pattern generator utilizing three or four mutually coherent optical beams organized in a flexible beam expansion, filtering, aperturing, and delivery system, large area pattern uniformity is attained via optimized illumination beam positioning and shaping. A passive stabilization system achieves fully modulated interferometric patterns in high mechanical and acoustical vibration manufacturing environments.
Claims22
A lithographic tool system including an interferometric pattern generator, comprising:
- a coherent light source generating a coherent light source beam;
- means for dividing said coherent light source beam into first, second and third mutually coherent optical beams;
- a first optical waveguide having a first end and a second end including means for launching said first mutually coherent optical beam into said first waveguide first end and having an optical element on said first waveguide second end, wherein said optical element causes said first mutually coherent optical beam to become a first divergent beam having a first centroid;
- a second optical waveguide having a first end and a second end including means for launching said second mutually coherent optical beam into said second waveguide first end and having an optical element on said second waveguide second end, wherein said optical element causes said second mutually coherent optical beam to become a second divergent beam having a second centroid;
- a third optical waveguide having a first end and a second end including means for launching said third mutually coherent optical beam into said third waveguide first end and having an optical element on said third waveguide second end, wherein said optical element causes said third mutually coherent optical beam to become a third divergent beam having a third centroid;
- a platform having a substantially planar surface adapted to support a workpiece having a selected thickness and a photosensitive surface;
- a first support disposed a selected distance from the platform surface, wherein said first support includes a first mount, and said first waveguide second end is affixed to said first mount and positioned to aim said first divergent beam at said platform surface;
- wherein said first support further includes a second mount, and said second waveguide second end is affixed to said second mount and positioned to aim said second divergent beam at said platform surface;
- wherein said first support further includes a third mount, and said third waveguide second end is affixed to said third mount and positioned to aim said third divergent beam at said platform surface;
- and
- wherein said first divergent beam, said second divergent beam, and said third divergent beam are combined to generate an interferometric pattern of light in a reference plane, said reference plane being defined by overlap of said centroids of said first, second and third divergent beams, and said reference plane is substantially parallel to said platform surface.
8 more elements
A method for generating an interferometric pattern, comprising the following method steps:
- (a) generating a coherent light source beam;
- (b) dividing said coherent light source beam into first, second and third mutually coherent optical beams;
- (c) launching said first mutually coherent optical beam into a first waveguide first end, wherein said launching causes said first mutually coherent optical beam to become a first aberrated beam having a first centroid;
- (d) launching said second mutually coherent optical beam into a second waveguide first end, wherein said launching causes said second mutually coherent optical beam to become a second aberrated beam having a second centroid;
- (e) providing a first support at a selected distance from a substantially planar platform surface,
- (f) placing a workpiece having a selected thickness and a photosensitive surface on said panel surface;
- (g) aiming said first aberrated beam at said platform surface;
- (h) aiming said second aberrated beam at said platform surface;
- (i) combining said first aberrated beam and said second aberrated beam;
- and
- (j) generating an interferometric pattern of light in a reference plane, said reference plane being defined by overlap of said centroids of said first and second aberrated beams, wherein said reference plane is substantially parallel to said platform surface and offset from said platform surface by a selected offset distance greater than said workpiece selected thickness.
8 more elements
A lithographic tool system including an interferometric pattern generator, comprising:
- a coherent light source generating a coherent light source beam;
- means for dividing said coherent light source beam into first, second, third and fourth mutually coherent optical beams;
- a first optical waveguide having a first end and a second end including means for launching said first mutually coherent optical beam into said first waveguide first end and having a diffusing optical element on said first waveguide second end, wherein said optical element causes said first mutually coherent optical beam to become a first divergent aberrated beam having a first centroid;
- a second optical waveguide having a first end and a second end including means for launching said second mutually coherent optical beam into said second waveguide first end and having a diffusing optical element on said second waveguide second end, wherein said optical element causes said second mutually coherent optical beam to become a second divergent aberrated beam having a second centroid;
- a third optical waveguide having a first end and a second end including means for launching said third mutually coherent optical beam into said third waveguide first end and having a diffusing optical element on said third waveguide second end, wherein said optical element causes said third mutually coherent optical beam to become a third divergent aberrated beam having a third centroid;
- a fourth optical waveguide having a first end and a second end including means for launching said fourth mutually coherent optical beam into said fourth waveguide first end and having a diffusing optical element on said fourth waveguide second end, wherein said optical element causes said first mutually coherent optical beam to become a fourth divergent aberrated beam having a first centroid;
- a platform having a substantially planar surface adapted to support a workpiece having a selected thickness and a photosensitive surface;
- a first support disposed a selected distance from the platform surface, wherein said first support includes a first mount, and said first waveguide second end is affixed to said first mount and positioned to aim said first divergent aberrated beam at said platform surface;
- wherein said first support further includes a second mount, and said second waveguide second end is affixed to said second mount and positioned to aim said second divergent aberrated beam at said platform surface;
- wherein said first support further includes a third mount, and said third waveguide second end is affixed to said third mount and positioned to aim said third divergent aberrated beam at said platform surface;
- wherein said first support further includes a fourth mount, and said fourth waveguide second end is affixed to said fourth mount and positioned to aim said fourth divergent aberrated beam at said platform surface;
- and
- wherein said first divergent aberrated beam, said second divergent aberrated beam, said third divergent aberrated beam and said fourth divergent aberrated beam are combined to generate an interferometric pattern of light in a reference plane, said reference plane being defined by overlap of said centroids of said first, second, third and fourth divergent aberrated beams, and said reference plane is substantially parallel to said platform surface.
10 more elements
Dependencies are inferred from the claim text.