Hardcoats for flat panel display substrates
AssigneeAdvanced Refractory Technologies, Inc.
InventorsChandra Venkatraman, Cyndi Brodbeck
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Abstract
The present invention relates to a unique hard coating that provides the necessary characteristics for flat panel display plastic substrates because the coating is amorphous and is comprised of C, H, Si and O. The coating of the present invention is hard, optically transparent, scratch and abrasion resistant and hydrophobic. It is deposited by a low density, low temperature plasma enhanced chemical vapor deposition (PECVD) process and exhibits excellent barrier protection and reduced permeability to moisture, oxygen, helium and other vapors.
Claims17
An abrasive resistant, transparent barrier coating for plastic substrates comprised of carbon, hydrogen, silicon and oxygen in an amorphous structure wherein said coating is deposited at a temperature of or below about 70.degree. C. and at a pressure in the range of from about 50 mTorr to about 500 mTorr and further said coating having the properties of Nanoindentation hardness in the range of about 2 to about 10 GPa.
Dependencies are inferred from the claim text.