Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same

An optically readable radiation-displacement-conversion device, comprising:

• (a) a substrate;
• (b) a suspended portion attached to the substrate so as to extend over a region of the substrate, the suspended portion comprising (i) a radiation-absorbing region situated so as to receive an incident radiation and comprising a radiation-absorbing material that absorbs the incident radiation and converts absorbed radiation into heat, and (ii) a displaceable member that exhibits a displacement relative to the substrate whenever the radiation-absorbing material absorbs an amount of the incident radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the radiation-absorbing region, wherein the radiation-absorbing region is fixed relative to the substrate independently of any displacement of the displaceable member, wherein the displaceable member and the radiation-absorbing region are thermally connected to each other;
• and
• (c) an optically effecting portion that receives a readout light flux and that imparts a change to a characteristic of the readout light flux in accordance with the magnitude of the displacement of the displaceable member.

An optically readable radiation-displacement-conversion device, comprising:

• (a) a substrate;
• (b) a suspended portion attached to the substrate so as to extend over a region of the substrate, the suspended portion comprising (i) a radiation-absorbing region situated so as to receive an incident radiation and comprising a radiation-absorbing material that absorbs the incident radiation and converts absorbed radiation into heat, and (ii) a displaceable member that exhibits a displacement relative to the substrate whenever the radiation-absorbing material absorbs an amount of the incident radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the radiation-absorbing region;
• (c) an optically effecting portion that receives a readout light flux and that imparts a change to a characteristic of the readout light flux in accordance with the magnitude of the displacement of the displaceable member;
• and
• (d) an antireflection film for preventing reflection of portions of the readout light flux other than a portion to which the optically effecting portion imparts the change to the characteristic.

A method for detecting an incident infrared radiation, comprising the steps:

• (a) providing a substrate that is transmissive to infrared radiation;
• (b) providing a member comprising a first material that is absorptive for the incident infrared radiation and that converts absorbed infrared radiation to heat sufficient to cause the member to exhibit a displacement, wherein the member is thermally insulated from the substrate by a leg portion;
• (c) directing the infrared radiation to pass through the substrate and be incident on the first material so as to cause the first material to convert the incident infrared radiation to heat and thus cause the member to exhibit a corresponding displacement;
• and
• (d) directing a readout light flux to the member such that the readout light flux exhibits a change in a characteristic in accordance with the displacement, so as to detect the displacement.

An image-rendering method, comprising the steps:

• (a) providing on a substrate, transmissive to infrared radiation, multiple separate members each comprising a first material that is absorptive for an incident infrared radiation and that converts absorbed infrared radiation to heat sufficient to cause the respective member to exhibit a displacement relative to the substrate, each member being thermally insulated from the substrate by a respective leg portion;
• (b) directing the infrared radiation to pass through the substrate and be incident on the members so as to cause, in each member, the first material to convert the infrared radiation incident on the respective member to heat and thus cause the respective member to exhibit a corresponding displacement relative to the substrate;
• and
• (c) directing a readout light flux to the members such that, at each member, the readout light flux exhibits a change in a characteristic in accordance with the displacement of the respective member, so as to form an optical image from the collective displacements of the members.

A method for fabricating an optically readable radiation-displacement-conversion device having at least one pixel, the method comprising the steps:

• (a) for each pixel, forming a sacrificial layer on a substrate and forming on the substrate a leg portion for supporting a displaceable member such that the sacrificial layer is disposed at least around the leg portion and an upper part of the leg portion is left exposed;
• (b) for each pixel, forming on the leg portion and extending onto the sacrificial layer to define a desired profile of the displaceable member, a first film and a second film superposed on the first film, the first and second films having different coefficients of thermal expansion relative to each other;
• and
• (c) removing the sacrificial layer.

An image-rendering apparatus, comprising:

• (a) an optically readable radiation-displacement-conversion device comprising multiple pixels, each of the pixels comprising (i) a radiation-absorbing material for receiving and absorbing an incident invisible radiation and for generating an amount of heat in the radiation-absorbing material that is a function of the amount of absorbed radiation, (ii) a displaceable member exhibiting a displacement responsive to the heat generated in the radiation-absorbing material, the displacement being of a magnitude that is a function of the amount of generated heat;
• and (iii) an optically effecting portion that receives a readout light flux, imparts a change in a characteristic of the received readout light flux, the change being of a magnitude corresponding to the magnitude of the displacement, and emits the changed readout light;
• (b) a readout optical system comprising (i) a first lens for receiving and directing a readout light flux to illuminate the pixels with the readout light, and (ii) a second lens for receiving the changed readout light from the pixels and for forming an optical image corresponding to the collective displacements of the optically effecting portions of the pixels;
• (c) a sealable container for housing the optically readable radiation-displacement-conversion device in an environment suitably isolated from the external environment, the container comprising a window for transmitting the radiation;
• (d) a temperature stabilizer for maintaining the optically readable radiation-displacement-conversion device at a desired temperature;
• (e) a temperature sensor for detecting the temperature of the optically readable radiation-displacement-conversion device;
• and
• (f) a temperature controller connected to the temperature sensor and the temperature stabilizer for controlling the temperature stabilizer to maintain constancy of the temperature of the optically readable radiation-displacement-conversion device based on a temperature-detection signal from the temperature sensor.

An optically readable radiation-displacement-conversion device, comprising:

• (a) a substrate;
• (b) a first suspended portion mounted via a first leg portion to the substrate such that the first suspended portion extends over a region of the substrate, the first suspended portion comprising a radiation absorber that absorbs an invisible radiation and converts the absorbed radiation into heat, and a first displaceable member that exhibits a deflection relative to the substrate in response to the heat generated by the radiation absorber;
• (c) a second suspended portion mounted via a second leg portion to the substrate such that the second suspended portion extends over a region of the substrate, the second suspended portion comprising a second displaceable member that exhibits a deflection relative to the substrate, the deflection having a magnitude that is a function of the temperature of the substrate;
• and
• (d) an optically effecting portion for receiving a readout light flux, modifying the readout light flux, and producing a modified output light, the output light modification having a magnitude relative to the readout light flux, the magnitude corresponding to a displacement of the first and second displaceable members relative to each other, the first displaceable member exhibiting a direction of deflection due to generated heat that is similar to a direction of any displacement of the second displaceable member.

An optically readable radiation-displacement-conversion device, comprising:

• (a) a substrate;
• (b) a first suspended portion mounted to the substrate so as to extend over a region of the substrate, the first suspended portion comprising (i) a radiation absorber that receives and absorbs an invisible radiation and generates heat from the absorbed radiation, and (ii) a first displaceable member that exhibits a deformation in response to the heat thermal energy generated by the radiation absorber, the deformation causing a deflection of the first displaceable member in a direction relative to the substrate;
• (c) a second suspended portion mounted to the substrate so as to extend over a region of the substrate, the second suspended portion comprising a second displaceable member that exhibits a deflection relative to the substrate in response to substrate temperature, the displacement of the second displaceable member having a direction that is opposite to the direction of displacement of the first displaceable member so as to effectively cancel any influence by substrate temperature on net deflection;
• and
• (d) an optically effecting portion for receiving a readout light flux, modifying the readout light flux, and outputting the modified readout light, the modification being of an amount corresponding to the displacements of the first and second displaceable members relative to each other.

An image-rendering apparatus, comprising:

• (a) an optically readable infrared-radiation-displacement conversion device, comprising
• a substrate made of an infrared-radiation-transmitting material;
• multiple pixels each comprising a suspended portion and an optically effecting portion;
• each suspended portion being attached to the substrate so as to extend over a respective region of the substrate, each suspended portion comprising (i) a respective radiation-absorbing region situated so as to receive an incident infrared radiation passing through the substrate, the radiation-absorbing region comprising an infrared-radiation-absorbing material that absorbs the incident infrared radiation and converts absorbed infrared radiation into heat, and (ii) a respective displaceable member that exhibits a respective displacement relative to the substrate whenever the respective infrared-radiation-absorbing material absorbs an amount of the incident infrared radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the respective radiation-absorbing region;
• and
• each optically effecting portion receiving a readout light flux and imparting a respective change to a characteristic of the readout light flux in accordance with the respective magnitude of the displacement of the displaceable member, each optically effecting portion comprising a reflector for reflecting the received readout light flux, the reflector forming a portion of the respective suspended portion and exhibiting a respective displacement along with any displacement of the respective displaceable member;
• and
• (b) a readout optical system, comprising (i) a beamsplitter for receiving a readout light flux and splitting the readout light flux into first and second readout beams, irradiating the reflector of the optically effecting portion of each of the pixels with the first readout beam, and causing readout light reflected from the reflectors to interfere with readout light from the second beam so as to generate interference light from each of the pixels;
• and (ii) a lens for forming an optical image from the interference light.

An image-rendering apparatus, comprising:

• (a) an optically readable infrared-radiation-displacement conversion device, comprising
• a substrate made of an infrared-radiation-transmitting material;
• multiple pixels each comprising a suspended portion and an optically effecting portion;
• each suspended portion being attached to the substrate so as to extend over a respective region of the substrate, each suspended portion comprising (i) a respective radiation-absorbing region situated so as to receive an incident infrared radiation passing through the substrate, the radiation-absorbing region comprising an infrared-radiation-absorbing material that absorbs the incident infrared radiation and converts absorbed infrared radiation into heat, and (ii) a respective displaceable member that exhibits a respective displacement relative to the substrate whenever the respective infrared-radiation-absorbing material absorbs an amount of the incident infrared radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the respective radiation-absorbing region;
• and
• each optically effecting portion receiving a readout light flux and imparting a respective change to a characteristic of the readout light flux in accordance with the respective magnitude of the displacement of the displaceable member, each optically effecting portion comprising a reflector for reflecting the received readout light flux, the reflector forming a portion of the respective suspended portion and exhibiting a respective displacement along with any displacement of the respective displaceable member;
• and
• (b) a readout optical system, comprising (i) means for receiving the readout light flux and for irradiating the reflector of each of the pixels with the readout light flux;
• (ii) a lens for receiving readout light reflected from the reflectors and for forming an optical image from the reflected readout light, the reflected readout light reflected from each reflector having an intensity that varies with the inclination of the respective reflector;
• and a pupil for blocking the readout light reflected from the reflector of each pixel by an amount corresponding to the inclination of the reflector.

An image-rendering apparatus, comprising:

• (a) an optically readable infrared-radiation-displacement conversion device, comprising
• a substrate made of an infrared-radiation-transmitting material;
• multiple pixels each comprising a suspended portion and an optically effecting portion;
• each suspended portion being attached to the substrate so as to extend over a respective region of the substrate, each suspended portion comprising (i) a respective radiation-absorbing region situated so as to receive an incident infrared radiation passing through the substrate, the radiation-absorbing region comprising an infrared-radiation-absorbing material that absorbs the incident infrared radiation and converts absorbed infrared radiation into heat, and (ii) a respective displaceable member that exhibits a respective displacement relative to the substrate whenever the respective infrared-radiation-absorbing material absorbs an amount of the incident infrared radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the respective radiation-absorbing region;
• and
• each optically effecting portion receiving a readout light flux and imparting a respective change to a characteristic of the readout light flux in accordance with the respective magnitude of the displacement of the displaceable member, each optically effecting portion comprising a reflector for reflecting the received readout light flux, the reflector forming a portion of the respective suspended portion and exhibiting a respective displacement along with any displacement of the respective displaceable member;
• and
• (b) a readout optical system, comprising (i) means for receiving a readout light flux and for irradiating the reflectors of the pixels with a readout light flux such that, with respect to each pixel, the readout light flux is focused at a predetermined focus location relative to the respective reflector;
• (ii) means for passing the readout light reflected from each pixel through a corresponding aperture defined by a diaphragm plate situated conjugate with the focus locations, each aperture being located at a position corresponding to the respective focus position;
• and (iii) means for forming an optical image from the readout light collectively reflected from the reflectors of the pixels and passed through the apertures, respectively.

An image-rendering apparatus, comprising:

• (a) an optically readable infrared-radiation-displacement conversion device, comprising
• a substrate made of an infrared-radiation-transmitting material;
• multiple pixels each comprising a suspended portion and an optically effecting portion;
• each suspended portion being attached to the substrate so as to extend over a respective region of the substrate, each suspended portion comprising (i) a respective radiation-absorbing region situated so as to receive an incident infrared radiation passing through the substrate, the radiation-absorbing region comprising an infrared-radiation-absorbing material that absorbs the incident infrared radiation and converts absorbed infrared radiation into heat, and (ii) a respective displaceable member that exhibits a respective displacement relative to the substrate whenever the respective infrared-radiation-absorbing material absorbs an amount of the incident infrared radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the respective radiation-absorbing region;
• and
• each optically effecting portion receiving a readout light flux and imparting a respective change to a characteristic of the readout light flux in accordance with the respective magnitude of the displacement of the displaceable member, each optically effecting portion comprising a reflector for reflecting the received readout light flux, the reflector forming a portion of the respective suspended portion and exhibiting a respective displacement along with any displacement of the respective displaceable member;
• and
• (b) a readout optical system, comprising (i) means for irradiating the reflector of each of the pixels with a flux of polarized readout light;
• (ii) means for receiving readout light from each of the reflectors and for focusing the reflected readout light in an image-forming way;
• (iii) means for collectively receiving the focused images from the reflectors;
• and (iv) means for analyzing the received collected images so as to form an aggregate optical image from the readout light reflected from the reflectors.

An image-rendering apparatus, comprising:

• (a) an optically readable infrared-radiation-displacement conversion device, comprising
• a substrate made of an infrared-radiation-transmitting material;
• multiple pixels each comprising a suspended portion and an optically effecting portion;
• each suspended portion being attached to the substrate so as to extend over a respective region of the substrate, each suspended portion comprising (i) a respective radiation-absorbing region situated so as to receive an incident infrared radiation passing through the substrate, the radiation-absorbing region comprising an infrared-radiation-absorbing material that absorbs the incident infrared radiation and converts absorbed infrared radiation into heat, and (ii) a respective displaceable member that exhibits a respective displacement relative to the substrate whenever the respective infrared-radiation-absorbing material absorbs an amount of the incident infrared radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the respective radiation-absorbing region;
• and
• each optically effecting portion receiving a readout light flux and imparting a respective change to a characteristic of the readout light flux in accordance with the respective magnitude of the displacement of the displaceable member, each optically effecting portion comprising a reflector for reflecting the received readout light flux, the reflector forming a portion of the respective suspended portion and exhibiting a respective displacement along with any displacement of the respective displaceable member;
• and
• (b) a readout optical system, comprising (i) means for irradiating the reflector of each of the pixels with the readout light flux;
• (ii) means for receiving readout light reflected from the reflectors of the pixels;
• and (iii) means for forming, by phase difference, an optical image from the received readout light, the optical image being formed in accordance with the collective displacements of the displaceable members of the pixels.

An image-rendering apparatus, comprising:

• (a) an optically readable infrared-radiation-displacement conversion device, comprising
• a substrate made of an infrared-radiation-transmitting material;
• multiple pixels each comprising a suspended portion and an optically effecting portion;
• each suspended portion being attached to the substrate so as to extend over a respective region of the substrate, each suspended portion comprising (i) a respective radiation-absorbing region situated so as to receive an incident infrared radiation passing through the substrate, the radiation-absorbing region comprising an infrared-radiation-absorbing material that absorbs the incident infrared radiation and converts absorbed infrared radiation into heat, and (ii) a respective displaceable member that exhibits a respective displacement relative to the substrate whenever the respective infrared-radiation-absorbing material absorbs an amount of the incident infrared radiation, the displacement having a magnitude that is a function of the amount of heating experienced by the respective radiation-absorbing region;
• and
• each optically effecting portion receiving a readout light flux and imparting a respective change to a characteristic of the readout light flux in accordance with the respective magnitude of the displacement of the displaceable member, each optically effecting portion comprising a reflector for reflecting the received readout light flux, the reflector forming a portion of the respective suspended portion and exhibiting a respective displacement along with any displacement of the respective displaceable member;
• and
• (b) a readout optical system, comprising (i) means for irradiating the reflector of each of the pixels with the readout light;
• (ii) means for receiving readout light reflected from the reflectors of the pixels;
• and (iii) means for forming, by differential interference, an optical image from the received readout light, the optical image being formed in accordance with the collective displacements of the displaceable members of the pixels.