Method for generating a Shmoo plot contour for integrated circuit tester
AssigneeCredence Systems Corporation
InventorsRobert Huston, Daniel J. Bedell
Life of this patent
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Abstract
A method of operating an integrated circuit (IC) tester is disclosed in which an IC is repeatedly tested with respect to a limited number of combinations of values of two variable IC operating parameters (X and Y) to determine the boundary of a two-dimensional range of combinations of values of the X and Y parameters for which the IC passes a test. After finding a combination of X and Y parameter values on the boundary, each combination of parameter values to be tested thereafter is selected by altering either the X or Y parameter value, with the decision based on whether the IC passed the last test and on the manner in which a last tested combination of X and Y parameter values was selected.
Claims18
A method of testing an integrated circuit (IC) with respect to various combinations of values of a first variable IC operating parameter (X) and a second variable IC operating parameter (Y) to rapidly determine a boundary of a two-dimensional range of combinations of values of the X and Y parameters for which the IC operates properly, the method comprising the steps of:
- a. setting a first combination of values of said X and Y parameters;
- b. performing a test of said IC operating under said first combination of values of said X and Y parameters;
- c. if said IC fails the test performed at step b, repeatedly altering the value of the X parameter monotonically in a first direction to provide a first succession of combinations of values of said X and Y parameters and performing the test on the IC operating under each combination of said first succession until said IC passes said test;
- d. if said IC passes the test performed at step b, repeatedly altering the value of the X parameter monotonically in a second direction opposite of said first direction to form a second succession of combinations of values of said X and Y parameters, and performing the test on the IC operating under each combination of said second succession until said IC fails said test
- e. altering the value of said Y parameter, and repeating steps b through d, and
- f. performing a plurality of repetitions of step e with the value of the Y parameter being monotonically altered during each repetition of step e.
An apparatus for testing an integrated circuit (IC) with respect to various combinations of values of a first variable IC operating parameter (X) and a second variable IC operating parameter (Y) to rapidly determine a boundary of a two-dimensional range of combinations of values of the X and Y parameters for which the IC operates properly, the apparatus comprising:
- tester means responsive to input control data indicating a combination of values of said X and Y parameter for performing a test on said IC operating on said combination of values and for producing output data indicating whether said IC passes said test;
- and
- control means for generating and transmitting said input control data to said tester means, said input control data indicating a first combination of values of said X and Y parameters such that said tester means performs said test of said IC operating under said first combination of values of said X and Y parameters, for receiving the output data produced by said tester means, and it said output data indicates said IC fails the test of said IC operating under said first combination of values of said X and Y parameters, for repeatedly generating and transmitting input altering the value of the X parameter monotonically in a first direction to provide a first succession of combinations of values of said X and Y parameters so that said tester means repeatedly performs the test on the IC operating under each combination of said first succession until said output data produced by said tester means indicates said IC passes said test, and if said output data indicates said IC passes the test of said IC operating under said first combination of values of said X and Y parameters, repeatedly altering the value of the X parameter monotonically in a second direction opposite of said first direction to form a second succession of combinations of values of said X and Y parameters, so that said tester performs the test on the IC operating under each combination of said second succession until said output data produced by said tester means indicates said IC fails said test, and for then monotonically altering the value of said Y parameter such that said tester means performs another test of said IC operation under a next combination of values of said X and Y parameters.
A method of testing an integrated circuit (IC) with respect to various combinations of values of a first variable IC operating parameter (X) and a second variable IC operating parameter (Y) to rapidly determine a boundary of a two-dimensional range of combinations of values of the X and Y parameters for which the IC operates properly after having located a combination of X and Y parameter values on said boundary, the method comprising the steps of:
- a. altering said Y parameter by a Y step amount to produce a current combination of X and Y parameter values,
- b. performing a test of said IC operating under said current combination of X and Y parameter values;
- c. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing said Y parameter value, and the IC passed the test last performed at step b, then decreasing the X parameter value to produce a new current combination of X and Y parameter values,
- d. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the Y parameter value, and the IC passed the test last performed at step b, then increasing the X parameter value in a fourth direction opposite to said third direction to produce a new current combination of X and Y parameter values,
- e. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the X parameter value, and the IC passed the test last performed at step b, then increasing the Y parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- f. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing the X parameter value, and the IC passed the test last performed at step b, then decreasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- g. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the Y parameter value, and the IC failed the test last performed at step b, then increasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- h. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing the Y parameter value, and the IC failed the test last performed at step b, then decreasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- i. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the X parameter value, and the IC failed the test last performed at step b, then decreasing the Y parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- j. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing the X parameter value, and the IC failed the test last performed at step b, then increasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b.
A method of testing an integrated circuit (IC) with respect to various combinations of values of a first variable IC operating parameter (X) and a second variable IC operating parameter (Y) to rapidly determine a boundary of a two-dimensional range of combinations of values of the X and Y parameters for which the IC operates properly after having located a combination of X and Y parameter values on said boundary, the method comprising the steps of:
- a. altering said Y parameter by a Y step amount to produce a current combination of X and Y parameter values,
- b. performing a test of said IC operating under said current combination of X and Y parameter values;
- c. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing said Y parameter value, and the IC failed the test last performed at step b, then decreasing the X parameter value to produce a new current combination of X and Y parameter values,
- d. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the Y parameter value, and the IC failed the test last performed at step b, then increasing the X parameter value in a fourth direction opposite to said third direction to produce a new current combination of X and Y parameter values,
- e. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the X parameter value, and the IC failed the test last performed at step b, then increasing the Y parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- f. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing the X parameter value, and the IC failed the test last performed at step b, then decreasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- g. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the Y parameter value, and the IC passed the test last performed at step b, then increasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- h. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing the Y parameter value, and the IC passed the test last performed at step b, then decreasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- i. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by decreasing the X parameter value, and the IC passed the test last performed at step b, then decreasing the Y parameter value to produce a new current combination of X and Y parameter values and returning to step b,
- j. if the current combination of X and Y parameter values for which the IC was last tested at step b was produced by increasing the X parameter value, and the IC passed the test last performed at step b, then increasing the X parameter value to produce a new current combination of X and Y parameter values and returning to step b.
Dependencies are inferred from the claim text.