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US 6,077,344 AGranted
Sol-gel deposition of buffer layers on biaxially textured metal substances
AssigneeLockheed Martin Energy Research Corporation
InventorsShara S. Shoup, Mariappan Paranthamam, David B. Beach, Donald M. Kroeger, Amit Goyal
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Abstract
A method is disclosed for forming a biaxially textured buffer layer on a biaxially oriented metal substrate by using a sol-gel coating technique followed by pyrolyzing/annealing in a reducing atmosphere. This method is advantageous for providing substrates for depositing electronically active materials thereon.
Claims19
A method of forming a buffer layer on a metal substrate, comprising the steps of:
- coating a biaxially textured metal substrate with a sol-gel solution of a metal oxide;
- and
- heating the coated metal substrate in a reducing atmosphere under such conditions that the sol-gel solution forms an epitaxial buffer layer.
A method of making an electronic device, comprising the steps of:
- coating a biaxially textured metal substrate with a sol-gel solution of a metal oxide;
- heating the coated substrate in a reducing atmosphere under such conditions that the sol-gel solution forms an epitaxial buffer layer;
- and
- depositing an electronically active layer on the buffer layer.
1 more element
Dependencies are inferred from the claim text.