Micromechanical microphone
AssigneeMicrotronic A/S
InventorsJesper Bay, Siebe Bouwstra, Ole Hansen
Life of this patent
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Abstract
A Micromechanical Microphone is formed with a housing and a transducer therein. The housing has a sound inlet on one side of the transducer and a pressure compensation hole on the opposite side. A sealing diaphragm is placed on each side of the transducer to seal it against humidity, dust and dirt. The transducer may be a capacitive transducer with an external bias or an electret based transducer. The microphone is useful in small devices such as hearing aides.
Claims16
A micromechanical microphone with a transducer element having a conductive center electrode formed with through holes within its periphery and spaced therefrom, an electrically conductive sealing diaphragm disposed on each side of the center electrode, the diaphragms being fixed to the center electrode along the periphery thereof, the microphone comprising:
- connecting means mechanically interconnecting the diaphragms, said connecting means passing movably through at least one of the holes in the center electrode for allowing the diaphragms and the connecting means to move relative to the center electrode.
A micromechanical microphone with a transducer element having a conductive center electrode formed with through holes within its periphery and spaced therefrom, an electrically conductive sealing diaphragm disposed on each side of the center electrode, the diaphragms being fixed to the center electrode along the periphery thereof, the microphone comprising:
- connecting means mechanically interconnecting the diaphragms, said connecting means passing movably through at least one of the holes in the center electrode for allowing the diaphragms and the connecting means to move relative to the center electrode, and wherein the diaphragms have central and peripheral regions and the central regions of the diaphragms are stiffer than the peripheral regions.
Dependencies are inferred from the claim text.