Z-pinch soft x-ray source using diluent gas

A plasma X-ray source comprising:

• a chamber defining a pinch region having a central axis, said pinch region being substantially uniform along said central axis;
• a gas supply coupled to said chamber for introducing a gas mixture comprising a primary X-radiating gas and a low atomic number diluent gas into said pinch region;
• an RF electrode disposed around said pinch region for pre-ionizing the gas mixture in said pinch region to form a plasma shell that is symmetrical around said central axis in response to application of RF energy to said RF electrode;
• and
• a pinch anode and a pinch cathode disposed at opposite ends of said pinch region for producing a current through said plasma shell in an axial direction and for producing an azimuthal magnetic field in said pinch region in response to application of a high energy electrical pulse to said pinch anode and pinch cathode, whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays in a spectral range from 100 angstroms to 150 angstroms.

In a plasma X-ray source comprising a chamber defining a pinch region having a central axis, a method for generating X-rays comprising the steps of:

• introducing a gas mixture comprising a primary X-radiating gas and a low atomic number diluent gas into said pinch region;
• preionizing the gas mixture in the pinch region to form a plasma shell that is symmetrical around the central axis;
• and
• producing a current through said plasma in an axial direction and producing an azimuthal magnetic field in said pinch region, whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays in a spectral range from 100 angstroms to 150 angstroms.

A plasma X-ray source comprising:

• a chamber defining a pinch region having a central axis;
• a gas supply for introducing a gas mixture, comprising a primary X-radiating gas and a low atomic number diluent gas, into said pinch region;
• a preionizing device disposed in proximity to said pinch region for preionizing the gas mixture in said pinch region to form a plasma shell that is symmetrical around said central axis;
• and
• a pinch anode and a pinch cathode disposed at opposite ends of said pinch region for producing a current through said plasma shell in an axial direction and for producing an azimuthal magnetic field in said pinch region in response to application of a high energy electrical pulse to said pinch anode and said pinch cathode, whereby said azimuthal magnetic field causes said plasma shell to collapse to said central axis and to generate X-rays, wherein said primary X-radiating gas comprises xenon for generation of 134 angstrom xenon band radiation and wherein said diluent gas comprises helium.