Opaque low reflecting coating aperture on glass
AssigneeTexas Instruments Incorporated
InventorsFrank C. Sulzbach, Ching-Tai Chen
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Abstract
A glass surface with a low reflectance opaque aperture coating (12). In one example the coating has two layers, in another the coating has three layers. In a third example the coating includes a filter layer structure(36). The coating can be deposited onto the glass or an antireflective coating (14). A process is included in which the opaque coating is formed. The process includes depositing the coating on an antireflective coating, then patterning and etching the opaque coating to define a clear aperture area.
Claims25
A glass surface used with a spatial light modulator array operable to transmit light, comprised of:
- an antireflective coating on at least one side of a glass surface;
- an opaque coating on said antireflective coating, said opaque coating having at least two layers and a photopic reflectance of less than 10%.
An apparatus comprising:
- a first layer made of a material having a high transmittance for light, said first layer having first and second portions;
- and
- a second layer disposed on a first side of said first layer in alignment with said second portion of said first layer, said second layer being opaque and having a radiometric reflectance which is greater than a predetermined percentage for radiation impinging on said second layer in a direction from a second side of said first layer opposite from said first side thereof.
Dependencies are inferred from the claim text.