Leakproof and fireproof tubing
AssigneeUnited Microelectronics Corp.
InventorChun-Chen Chen
Life of this patent
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Abstract
A leakproof and fireproof tubing according to the invention comprises an inner tube for guiding a chemical fluid, a heater surrounding the inner tube, a foil enclosing the inner tube which is already surrounded by the heater, and an outer tube surrounding and coaxial with the inner tube. When chemical fluid leakage or a fire caused by a short circuit in the heater is encountered, the tubing can efficiently prevent the chemical fluid leakage and fire from further extending to the outside atmosphere. In coordination with the use of a sensor, the failure of the tubing can be repaired in a timely manner.
Claims10
A leakproof and fireproof tubing, comprising:
- an inner tube connected to a gas cylinder;
- a heater surrounding the inner tube;
- a foil enclosing the inner tube which is already surrounded by the heater;
- an outer tube surrounding and coaxial with the inner tube;
- a sensor installed between the inner tube and the outer tube;
- and
- an exhaust port communicating with a closed system between the inner tube and the outer tube.
Dependencies are inferred from the claim text.