Semiconductor substrate, semiconductor device and method of manufacturing the same
AssigneeMatsushita Electronics Corporation
InventorsTadao Hashimoto, Osamu Imafuji, Masaaki Yuri, Masahiro Ishida
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AssigneeMatsushita Electronics Corporation
InventorsTadao Hashimoto, Osamu Imafuji, Masaaki Yuri, Masahiro Ishida
Estimating the term…
A sapphire substrate, a buffer layer of undoped GaN and a compound semiconductor crystal layer successively formed on the sapphire substrate together form a substrate of a light emitting diode. A first cladding layer of n-type GaN, an active layer of undoped In.sub.0.2 Ga.sub.0.8 N and a second cladding layer successively formed on the compound semiconductor crystal layer together form a device structure of the light emitting diode. On the second cladding layer, a p-type electrode is formed, and on the first cladding layer, an n-type electrode is formed. In a part of the sapphire substrate opposing the p-type electrode, a recess having a trapezoidal section is formed, so that the thickness of an upper portion of the sapphire substrate above the recess can be substantially equal to or smaller than the thickness of the compound semiconductor crystal layer.
A semiconductor substrate comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.