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US 6,067,858 AGranted
Micromachined vibratory rate gyroscope
AssigneeThe Regents of the University of California
InventorsWilliam A. Clark, Thor Juneau, Roger T. Howe
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Abstract
A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.
Claims4
A microfabricated gyroscopic sensor, comprising:
- a substrate having a first plurality of electrode teeth;
- a vibratory structure including a mass a second plurality of electrode teeth projecting from the mass and a suspension system connecting the mass to the substrate, the second plurality of electrode teeth interdigited with the first plurality of electrode teeth;
- a drive system to cause the vibratory structure to oscillate relative to the substrate;
- and
- a position sensor to measure a deflection of the mass caused by a Coriolis force;
- wherein the first and second pluralities of electrode teeth have thicknesses substantially greater than their widths.
3 more elements
Dependencies are inferred from the claim text.