# US 6,064,215 A · High temperature probe card for testing integrated circuits > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,064,215 A - Document ID: US6064215A - Status: Granted - Kind: A - Application number: 09/057,080 - Filed: 1998-04-08 - Granted: 2000-05-16 - Earliest claimed: 1998-04-08 - Assignees: Probe Technology - Inventors: January Kister - Web page: https://patentgrep.com/patent/US6064215A ## CPC - G01R 31/2886: {Features relating to contacting the IC under test, e.g. probe heads; chucks (G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A probe card for testing integrated circuits which maintains rigidity and probe alignment at elevated temperatures. The probe card has a number of probes radially oriented on an insulating plate with a nonuniform radial distribution. The probes extend through an insulating ring. The nonuniform radial distribution of probes has gaps which allows for bolt or attachment to attach a rigid plate to the insulating ring. The insulating plate can be made of printed circuit board material, the insulating ring can be made of epoxy. The rigid plate can be made of stainless steel or any other material that maintains rigidity at elevated temperatures. Preferably, the insulating plate also has a stiffener ring located opposite the insulating ring on the top side. The bolts extend through the stiffener ring. The insulating plate has vias which allow the probes to be electrically connected to test electronics located above a top side of the insulating plate. The rigid plate maintains the rigidity of the apparatus and provides heat shielding for the insulating ring and insulating plate. Alternatively, the rigid plate is located above the insulating plate and bolted to the stiffener ring. ## Claims ### Claim 1 A probe card having a contact force direction, said probe card being centrally assembled by a straining means in said contact force direction, said probe card comprising: a) an insulating plate; b) an insulating ring having a first fixating plane; c) a plurality of probes extending through the insulating ring in a nonuniform radial distribution such that at least 2 gaps exist in the nonuniform radial distribution; d) a rigid plate being strained attached to said first fixating plane; e) a first straining means for centrally strained attaching the rigid plate to the insulating ring, the straining means being located in the gaps; whereby the rigid plate renders the probes resistant to misalignment. ### Claim 2 (depends on 1) The probe card of claim 1 further comprising a stiffener ring disposed on the insulating plate opposite the insulating ring such that the straining means compresses the insulating plate and insulating ring between the stiffener ring and the rigid plate. ### Claim 3 (depends on 1) The probe card of claim 1 wherein the rigid plate is shaped to fit over the insulating ring. ### Claim 4 (depends on 1) The probe card of claim 1 wherein the rigid plate is made of a material that maintains rigidity at elevated temperatures. ### Claim 5 (depends on 1) The probe card of claim 1 wherein the rigid plate has thermal expansion slots. ### Claim 6 (depends on 5) The probe card of claim 5 wherein the thermal expansion slots are angular thermal expansion slots. ### Claim 7 (depends on 5) The probe card of claim 5 wherein the thermal expansion slots are radial thermal expansion slots. ### Claim 8 (depends on 5) The probe card of claim 5 wherein the thermal expansion slots are zig-zag thermal expansion slots having a zig-zag shape. ### Claim 9 (depends on 1) The probe card of claim 1 wherein the straining means is selected from the group consisting of bolts, screws, clamps and rivets. ### Claim 10 (depends on 1) The probe card of claim 1 wherein the rigid plate comprises a material selected from the group consisting of stainless steel, steel, aluminum and ceramics. ### Claim 11 (depends on 1) The probe card of claim 1 wherein the insulating plate has vias for conducting signals from the probes to the top side of the insulating plate. ### Claim 12 (depends on 1) The probe card of claim 1 wherein the rigid plate is bonded to the insulating plate bottom side. ### Claim 13 (depends on 1) The probe card of claim 1 wherein the insulating plate does not have a central hole. ### Claim 14 (depends on 1) The probe card of claim 1 wherein the insulating plate has a central hole and the insulating ring extends within the central hole. ### Claim 15 A probe card having a contact force direction, said probe card being centrally assembled by a straining means in said contact force direction, said probe card comprising: a) an insulating ring having a first fixating plane and an opposing second fixating plane; b) a plurality of probes extending through the insulating ring in a nonuniform radial distribution such that at least 2 gaps exist in the nonuniform radial distribution; c) an insulating plate being strained attached to said first fixating plane; d) a rigid plate being strained attached to said opposing second fixating plane; e) a straining means for centrally strained attaching the insulating ring to said insulating plate and to said rigid plate, the straining means being located in the gaps; whereby the rigid plate renders the probes resistant to misalignment. ### Claim 16 (depends on 1) The probe card of claim 1 further comprising a stiffener ring disposed on the insulating plate opposite the insulating ring such that the straining means compresses the insulating plate and insulating ring between the stiffener ring and the rigid plate. ### Claim 17 (depends on 15) The probe card of claim 15 wherein the rigid plate is shaped to fit over the stiffener ring. ### Claim 18 (depends on 15) The probe card of claim 15 wherein the rigid plate has at least one rigid plate hole for providing electrical conductors access through the rigid plate. ### Claim 19 (depends on 1) The probe card of claim 1 wherein the straining means is selected from the group consisting of bolts, screws, clamps and rivets. ### Claim 20 (depends on 15) The probe card of claim 15 wherein the rigid plate is made of a material that maintains rigidity at elevated temperatures. ### Claim 21 (depends on 15) The probe card of claim 15 wherein the rigid plate comprises a material selected from the group consisting of stainless steel, steel, aluminum and ceramics. ### Claim 22 (depends on 15) The probe card of claim 15 wherein the insulating plate has vias for conducting signals from the probes to the top side of the insulating plate. ### Claim 23 (depends on 15) The probe card of claim 15 wherein the rigid plate is bonded to the insulating plate top side. ### Claim 24 (depends on 15) The probe card of claim 15 wherein the insulating plate does not have a central hole. ### Claim 25 (depends on 15) The probe card of claim 15 wherein the insulating plate has a central hole and the insulating ring extends within the central hole. ### Claim 26 A probe card having a contact force direction, said probe card being centrally assembled by a straining means in said contact force direction, said probe card comprising: a) an insulating ring having a first fixating plane; b) a plurality of probes extending through the insulating ring in a nonuniform radial distribution such that at least 2 gaps exist in the nonuniform radial distribution; c) an insulating plate being strained attached to said first fixating plane; d) a rigid plate being strained attached to said second fixating plane; e) a first straining means for centrally strained attaching the insulating plate so said insulating ring and a second straining means for attaching said rigid plate to said insulating plate, the first straining means being located in the gaps; whereby the rigid plate renders the probes resistant to misalignment. ### Claim 27 (depends on 26) The probe card of claim 26 further comprising a stiffener ring disposed on the insulating plate top side opposite the insulating ring. ### Claim 28 (depends on 26) The probe card of claim 26 wherein the rigid plate is made of a material that maintains rigidity at elevated temperatures. ### Claim 29 (depends on 26) The probe card of claim 26 wherein the rigid plate has thermal expansion slots. ### Claim 30 (depends on 29) The probe card of claim 29 wherein the thermal expansion slots are angular thermal expansion slots. ### Claim 31 (depends on 29) The probe card of claim 29 wherein the thermal expansion slots are radial thermal expansion slots. ### Claim 32 (depends on 29) The probe card of claim 29 wherein the thermal expansion slots are zig-zag thermal expansion slots having a zig-zag shape. ### Claim 33 (depends on 26) The probe card of claim 26 wherein the straining means is selected from the group consisting of bolts, screws, clamps and rivets. ### Claim 34 (depends on 26) The probe card of claim 26 wherein the rigid plate comprises a material selected from the group consisting of stainless steel, steel, aluminum and ceramics. ### Claim 35 (depends on 26) The probe card of claim 26 wherein the insulating plate has vias for conducting signals from the probes to the top side of the insulating plate. ### Claim 36 (depends on 26) The probe card of claim 26 wherein the insulating plate does not have a central hole. ### Claim 37 (depends on 26) The probe card of claim 26 wherein the insulating plate has a central hole and the insulating ring extends within the central hole. ### Claim 38 (depends on 1) The probe card of claim 1, wherein said rigid plate has a second fixating plane. ### Claim 39 (depends on 38) The probe card of claim 38, wherein said insulating plate is strained attached at said second fixating plane with a second straining means. ### Claim 40 (depends on 39) The probe card of claim 39, wherein said second straining means is selected from the group consisting of bolts, screws, clamps and rivets. ### Claim 41 (depends on 26) The probe card of claim 26, wherein said insulating plate has a second fixating plane. ### Claim 42 (depends on 41) The probe card of claim 41, wherein said rigid plate is strained attached at said second fixating plane with a second straining means. ### Claim 43 (depends on 42) The probe card of claim 42, wherein said second straining means is selected from the group consisting of bolts, screws, clamps and rivets.