Device for heating fluid controller
AssigneeFujikin Incorporated
InventorsYukio Minami, Nobukazu Ikeda, Michio Yamaji, Tsutomu Tanigawa
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Abstract
A device for heating a fluid controller comprises a pair of platelike side heaters pressed respectively against a pair of opposite side faces of a body of the fluid controller with an insulating layer provided between each heater and each side face, a pair of side holding members each having a recessed portion for fitting the side heater therein and fastened to each other with screws to hold the controller body therebetween from opposite sides of the body, and a cushion member interposed between each side heater and a bottom face of the recessed portion for pressing the side heater against the controller body side face.
Claims5
A device for heating a fluid controller which device comprises a pair of platelike side heaters pressed respectively against a pair of opposite side faces of a body of the fluid controller with an electrical insulating layer provided between each heater and each side face, a pair of side holding members each having a recessed portion for fitting the side heater therein and fastened to each other with screws to hold the controller body therebetween from opposite sides of the body, and a cushion member interposed between each side heater and a bottom face of the recessed portion for pressing the side heater against the controller body side face.
Dependencies are inferred from the claim text.