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US 6,058,781 AGranted
Pressure sensor structure
AssigneeUnisia Jecs Corporation
InventorsKoichi Kusuyama, Masao Tsukada
Life of this patent
Estimating the term…
Abstract
A pressure sensor including a substrate having a diaphragm portion. A diaphragm-defining recess is recessed inwardly from one surface of the substrate to define the diaphragm portion between a bottom surface of the recess and an opposite surface of the substrate. A recess is disposed within the diaphragm portion. A pressure sensitive arrangement is disposed in the substrate, a detector portion of which is disposed within the recess formed within the diaphragm portion.
Claims46
A pressure sensor, comprising:
- a diaphragm portion;
- a substrate including said diaphragm portion, said substrate having one surface and an opposite surface and formed with a first recess recessed inwardly from said one surface to define said diaphragm portion between said first recess and said opposite surface;
- a second recess disposed within the diaphragm portion;
- a pressure sensitive arrangement having a detector portion disposed within the second recess;
- and
- a lid fixed to the diaphragm portion to cover the second recess and the detector portion of the pressure sensitive arrangement.
3 more elements
A pressure sensor formed by a method comprising the steps of:
- a) preparing a substrate having opposed surfaces;
- b) forming a first recess recessed inwardly from one of the opposed surfaces of the substrate to form a diaphragm portion between the first recess and the other of the opposed surfaces;
- c) forming a second recess within the diaphragm portion;
- d) placing a detector portion, forming a part of a pressure sensitive arrangement, within the second recess;
- e) placing other parts of the pressure sensitive arrangement in the substrate, comprising:
- placing diffused leads connected with the detector portion, in the substrate;
- and
- depositing an electrically conductive film connected with the diffused leads, on the substrate;
- and
- f) fixing a lid to the diaphragm portion to define a reference pressure chamber between the second recess and a surface of the lid opposed to the second recess.
7 more elements
Dependencies are inferred from the claim text.