Fabrication of scanning III-V compound light emitters integrated with Si-based actuators

A method of making a movable light emitting assembly, comprising:

• a substrate having a top and a bottom made of semiconductor material, the substrate including a doped layer on the bottom of the substrate, an etch stop layer, a buffer layer, and light source layers and;
• forming a light source from the light source layers;
• forming a light source support which movably supports the light source;
• forming at least one suspension member, each suspension member attached at a first end to the light source support and at a second end to the substrate thereby suspending the light support;
• and
• forming at least one force generator which moves the light support.