Laser diode device having a substantially circular light output beam and a method of forming a tapered section in a semiconductor device to provide for a reproducible mode profile of the output beam
AssigneeSDL, Inc.
InventorsHeonsu Jeon, Jean-Marc Verdiell
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Abstract
A device and method for fabricating a high power laser diode device with an output emission with a nearly circular mode profile for efficient coupling into an optical fiber. A vertical taper waveguide and a window tolerance region are formed in a base structure of the device employing successive etching steps. Further regowth completes the device structure. The resultant laser device has a vertical and lateral tapered waveguide that adiabatically transforms the highly elliptical mode profile in an active gain section of the device into a substantially circular mode profile in a passive waveguide section of the device.
Claims14
A laser diode device with an integrated taper waveguide section, comprising:
- a substrate;
- a first cladding layer formed on the substrate;
- a waveguide region formed on said first cladding layer;
- said waveguide region comprising a first waveguide layer over which is grown a second waveguide layer and a thin etch-stop layer formed between first and second waveguide layers;
- and
- a vertical taper formed in a portion of said second waveguide layer terminating at and exposing a portion of said etch-stop layer providing a window region of a length within which a cleave can be performed to form a facet upon further completion of the device.
Dependencies are inferred from the claim text.