Solid-state imaging device and method of detecting optical signals using the same
AssigneeInnovision, Inc.
InventorTakashi Miida
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Abstract
The present invention is a method for detecting photo signals using an imaging device, comprising steps of photo-generating holes in a well region 15 of a photo-diode by a signal light, transferring the photo-generated holes through a bulk of the well region 15 to a heavily doped buried layer 25 which is formed in the well region 15 near a source region 16 by doping that region with impurity heavier than the well region (15) of an insulated gate FET, storing the photo-generated holes in the heavily doped buried layer 25 to thereby change the threshold of the FET corresponding to the amount of the photo-generated charge, and reading the change in the threshold as the amount of signal light received by the photo-sensor.
Claims9
A solid-state imaging device equipped with a plurality of unit pixels each including a photo-diode and an insulated gate field effect transistor, said photo-diode comprising:
- a substrate having a first conductivity type;
- a semiconductor layer formed on said substrate and having a second conductivity type;
- a well region formed on said semiconductor layer and having the first conductivity type;
- an impurity region formed on the surface of said well region and having the second conductivity type, and
- said insulated gate field effect transistor comprises:
- a drain region formed on the surface of said well region, extending to said impurity region, and having the second conductivity type;
- a source region formed on the surface of said well region, spaced apart from said drain region, and having the second conductivity type;
- a gate electrode formed on a gate insulation layer which is formed on a gate region being said well region between said drain region and said source region;
- and
- a heavily doped buried layer formed in said well region near said source region below said gate electrode, said heavily doped buried layer doped with an impurity of the first conductivity type heavier in concentration than said well region.
Dependencies are inferred from the claim text.