Large area silent discharge excitation radiator
AssigneeQuester Technology, Inc.
InventorsGiovanni Antonio Foggiato, Leonid V. Velikov, Ralph F. Manriquez, Ashraf R. Khan
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AssigneeQuester Technology, Inc.
InventorsGiovanni Antonio Foggiato, Leonid V. Velikov, Ralph F. Manriquez, Ashraf R. Khan
Estimating the term…
Ultraviolet and vacuum ultraviolet radiators for use in the manufacture of semiconductors are provided which have improved lifetimes, improved distribution of radiation generation, improved distribution of emitted radiation, increased efficiency of radiation emission, and improved means for cooling. The radiators have novel electrodes, novel electrode configurations, novel means for distributing plasmas between electrodes, and have novel cooling means. These features enable the miniaturization of the radiators permitting high-intensity and uniform radiation exposure of planar surfaces. The radiators are used in the pre-treatment of semiconductor surfaces, the deposition of semiconductor thin films, and the post-deposition processing of semiconductor thin films.
A silent discharge radiator comprising:
A silent discharge radiator comprising:
A silent discharge radiator comprising:
An electrode for a silent discharge radiator comprising a conductive element imbedded within a dielectric material, and further comprising a multiplicity of physical discontinuities provided in said dielectric material, said discontinuities providing sites of distribution of discharge.
A silent discharge radiator comprising:
A silent discharge radiator comprising:
An electrode for a silent discharge radiator comprising a conductive element imbedded within a dielectric material having physical discontinuities and further comprising a plurality of gas channels in said electrode, wherein said gas channels have a gas channel axis substantially perpendicular to said electrode.
A silent discharge radiator comprising:
A silent discharge radiator comprising:
A silent discharge radiator comprising:
A silent discharge radiator comprising:
Dependencies are inferred from the claim text.