Void-free underfill of surface mounted chips
AssigneeMicron Technology, Inc.
InventorsSalman Akram, Tongbi Jiang
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AssigneeMicron Technology, Inc.
InventorsSalman Akram, Tongbi Jiang
Estimating the term…
A vacuum source creates uniform flow of underfill material in the interstices between a semiconductor device and a substrate. A semiconductor device is attached to a substrate and a plurality of dams surround the semiconductor device. The dams have at least a first opening to allow underfill material to be injected into the space between the semiconductor device and the substrate. A vacuum cup is placed over a second opening and a vacuum source is applied to draw the underfill material throughout the interstices. Because the vacuum source is drawing the underfill material in a uniform manner, the underfill material fills the space without creating voids. If desired, multiple vacuum sources and multiple injection sites may be used. The underfill material may also be inserted from an aperture in the substrate located beneath the semiconductor device.
A method of attaching a semiconductor device to a substrate, the method comprising:
A process for underfilling a device on a substrate comprising:
An apparatus for allowing uniform flow of underfill material in interstices between a semiconductor device and a substrate, the apparatus comprising:
A device for obtaining a void-free underfill in the space between a semiconductor device and a substrate, the device comprising:
A process for underfilling a device on a substrate comprising:
A device mounted to a substrate comprising:
A semiconductor mounting device comprising:
Dependencies are inferred from the claim text.