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US 6,046,657 AGranted
Magnetostrictive surface acoustic wave device and microelectronic circuit including same
AssigneeLucent Technologies Inc.
InventorsGlenn B. Alers, Robert Bruce Van Dover
Life of this patent
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Abstract
An improved surface acoustic wave device includes a film of a magnetostrictive material disposed on a substrate and spaced apart input and output transducer elements disposed on the film. The input element causes horizontally polarized shear waves to propagate along the film via the magnetostriction of the film. The shear waves propagating along the film are received by the output transducer element. The SAW device can be integrated on a microelectronic circuit useable in single chip radio frequency applications.
Claims15
A microelectronic circuit comprising:
- a substrate having a plurality of interconnected microcircuit elements;
- a surface acoustic wave device interconnected with at least one of the microelectronic circuit elements, the device comprising:
- a film of a magnetostrictive material disposed on a region of the substrate;
- an input transducer element disposed on the film for causing horizontally polarized shear waves to propagate along the film via the magnetostriction of the film;
- and
- an output transducer element disposed on the film and spaced from the input transducer, for receiving the shear waves propagating in the film.
3 more elements
A surface acoustic wave device comprising:
- a film of a magnetostrictive material having a saturation magnetostriction greater than 20 ppm disposed on a silicon substrate:
- an input magneto-elastic transducer element disposed on the film for causing horizontally polarized shear waves to propagate along the film via the magnetostriction of the film;
- and
- an output magneto-elastic transducer element disposed on the film and spaced from the input transducer, for receiving the shear waves propagating in the film;
- wherein the magnetostrictive material is selected from the group consisting of
- Ni.sub.x Fe.sub.1-x, Co.sub.x Fe.sub.1-x, Co.sub.1-x-y Ta.sub.x Zr.sub.y, Co.sub.1-x-y Nb.sub.x Zr.sub.y, Fe.sub.1-x-y Co.sub.x P.sub.y, Tb.sub.x Dy.sub.1-x Fe.sub.y, NiFe.sub.2 O.sub.4, (NiZn) Fe.sub.2 O.sub.4 and Fe.sub.3 O.sub.4, where x and y are non-zero.
3 more elements
Dependencies are inferred from the claim text.