Method and apparatus for sensing the natural frequency of a cantilevered body
AssigneeLockheed Martin Energy Systems, Inc.
InventorMichael G. Duncan
Life of this patent
Estimating the term…
Loading patent…
AssigneeLockheed Martin Energy Systems, Inc.
InventorMichael G. Duncan
Estimating the term…
A method and apparatus for measuring the natural resonant frequency of a spring element by monitoring a phase difference between an output signal from the spring element and an input signal to the spring element and by adjusting frequency of the input signal until a detected phase difference signals that the natural resonant frequency has been reached. The method and apparatus are applied to a micro-cantilevered elements used to measure gas compositions and concentrations. Such elements are provided with coatings that absorb gas to cause deflections and changes in the mass or spring constant of the cantilevered element. These changes correspond to changes in the natural resonant frequency of the cantilevered element which are measured using the method and apparatus described herein.
A method for measuring a natural resonant frequency of movement of a spring element, the method comprising:
An apparatus for measuring a natural frequency of movement of a spring element, the apparatus comprising:
Dependencies are inferred from the claim text.