Surface acoustic wave device using a leaky surface acoustic wave with an optimized cut angle of a piezoelectric substrate
AssigneeFujitsu Limited
InventorsMasanori Ueda, Osamu Kawachi, Gou Endoh, Osamu Ikata, Ken-ya Hashimoto, Masatsune Yamaguchi
Life of this patent
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Abstract
A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiTaO.sub.3 and an electrode pattern provided on the piezoelectric substrate. The electrode pattern contains Al as a primary component and has a thickness in a range of 0.03-0.15 times a wavelength of a surface acoustic wave excited on the piezoelectric substrate. The piezoelectric substrate has an orientation rotated about an X-axis thereof from a Y-axis thereof toward a Z-axis thereof, with a rotational angle of 39-46.degree..
Claims24
A surface acoustic wave device, comprising:
- a piezoelectric substrate of a single crystal LiTaO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Al as a primary component;
- said electrode pattern forming a resonator having a thickness in a range of about 0.03-0.15 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle more than 39.degree. and less than about 46.degree..
A surface acoustic wave filter, comprising:
- a piezoelectric substrate of a single crystal LiTaO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Al as a primary component, said electrode pattern including an interdigital electrode;
- said electrode pattern forming a resonator and having a thickness in a range of about 0.03-0.15 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle more than 39.degree. and less than about 46.degree..
A surface acoustic wave resonator, comprising:
- a piezoelectric substrate of a single crystal LiTaO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Al as a primary component, said electrode pattern including an interdigital electrode;
- said electrode pattern having a thickness in a range of about 0.03-0.15 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle more than 39.degree. and less than about 46.degree.;
- said interdigital electrode including a first electrode group and a second electrode group, said first electrode group including a first group of electrode fingers provided on said surface of said piezoelectric substrate and connected commonly to a first terminal, said second electrode group including a second group of electrode fingers provided on said surface of said piezoelectric substrate and connected commonly to a second terminal, said first and second group of electrode fingers being disposed such that a second group electrode finger is interposed between a pair of first group of electrode fingers.
A surface acoustic wave device, comprising:
- a piezoelectric substrate of a single crystal LiTaO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Au as a primary component;
- said electrode pattern forming a resonator and having a thickness in a range of 0.004-0.021 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle more than 39.degree. and less than about 46.degree..
A surface acoustic wave device, comprising:
- a piezoelectric substrate of a single crystal LiTaO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Cu as a primary component;
- said electrode pattern forming a resonator and having a thickness in a range of 0.009-0.045 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle more than 39.degree. but less than about 46.degree..
A surface acoustic wave device, comprising:
- a piezoelectric substrate of a single crystal LiNbO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Au as a primary component;
- said electrode pattern having a thickness in a range of 0.005-0.017 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle larger than 66.degree. but smaller than about 74.degree..
A surface acoustic wave device, comprising:
- a piezoelectric substrate of a single crystal LiNbO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Cu as a primary component;
- said electrode pattern having a thickness in a range of 0.012-0.036 times a wavelength of a surface acoustic wave excited on said surface of said piezoelectric substrate;
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle larger than 66.degree. but smaller than about 74.degree..
A surface acoustic wave device, comprising:
- a piezoelectric substrate of a single crystal LiNbO.sub.3 ;
- and
- an electrode pattern provided on a surface of said piezoelectric substrate and containing Al as a primary component;
- said electrode pattern having a thickness in a range of about 0.04-0.12 times a wavelength of a surface acoustic wave excited on said substrate,
- said piezoelectric substrate having an orientation rotated about an X-axis thereof, from a Y-axis thereof, toward a Z-axis thereof, with a rotational angle in a range larger than 66.degree. but smaller than about 74.degree..
Dependencies are inferred from the claim text.