Vacuum apparatus and a method of controlling a suction speed thereof
AssigneePfeiffer Vacuum GmbH
InventorArmin Conrad
Life of this patent
Estimating the term…
Abstract
A vacuum apparatus including at least one vacuum pump having at least one stage and high-vacuum and fore vacuum connections, and a connection line communicating a point located between the high vacuum and fore vacuum connections with the high vacuum connection; and a method for controlling a suction speed of the at least one vacuum pump.
Claims5
A method of controlling a suction speed of a vacuum pump, comprising the steps of:
- providing a vacuum pump having at least one stage, a high vacuum junction located upstream of the at least one stage, and a fore vacuum junction located downstream of the at least one stage, with gas flowing from the high vacuum junction to the fore vacuum junction;
- and
- diverting a portion of gas flow from a point, which is located downstream of the at least one stage and upstream of the fore vacuum junction, back to the high vacuum junction.
A vacuum apparatus, comprising:
- at least one vacuum pump having at least one stage, a high vacuum junction located upstream of the at least one stage, and a fore vacuum junction located downstream of the at least one stage, with gas flowing from the high vacuum junction to the fore vacuum junction;
- and
- a conduit communicating a point, which is located downstream of the at least one stage and upstream of the fore vacuum junction, with the high vacuum junction for diverting a portion of gas flow from the point between the at least one stage and the fore vacuum junction to the high vacuum function.
A vacuum apparatus as set forth in claim 7, further comprising a control valve located in the connecting line for controlling gas flow therethrough.
A vacuum apparatus as set forth in claim 7, wherein the at least one stage is formed as a turbo-molecular pump.
Dependencies are inferred from the claim text.