Semiconductor device evaluation system using optical fiber
AssigneeNEC Corporation
InventorKiyoshi Nikawa
Life of this patent
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Abstract
In a system for evaluating a semiconductor device, a laser beam generating unit generates a laser beam, and an optical fiber receives the laser beam to heat an area of the semiconductor device. A current deviation detector or a voltage deviation detector is connected to a terminal of the semiconductor device. As a result, the current deviation detector or the voltage deviation detector detects a current deviation or a voltage deviation at the terminal of the semiconductor device.
Claims51
A system for evaluating a semiconductor device, comprising:
- a laser beam generating unit for generating a laser beam;
- an optical fiber, coupled to said laser beam generating unit, for receiving said laser beam to heat an area of said semiconductor device;
- and
- a current deviation detector, connected to a first terminal of said semiconductor device, for detecting a current deviation at said first terminal caused by heating the area of said semiconductor device.
A system for evaluating a semiconductor device, comprising:
- a laser beam generating unit for generating a laser beam;
- an optical fiber, coupled to said laser beam generating unit, for receiving said laser beam to heat an area of said semiconductor device;
- and
- a voltage deviation detector, connected to a first terminal of said semiconductor device, for detecting a voltage deviation at said first terminal caused by heating the area of said semiconductor device.
A method for evaluating a semiconductor device, comprising the steps of:
- moving a tip portion of a spire-shaped optical fiber to an area of said semiconductor device;
- emitting a laser beam into said optical fiber to heat the area of said semiconductor device;
- and
- detecting a current deviation at a first terminal of said semiconductor device caused by heating the area of said semiconductor device.
A method for evaluating a semiconductor device, comprising the steps of:
- moving a tip portion of a spire-shaped optical fiber to an area of said semiconductor device;
- emitting a laser beam into said optical fiber to heat the area of said semiconductor device;
- and
- detecting a voltage deviation at a first terminal of said semiconductor device caused by heating the area of said semiconductor device.
A system for evaluating a semiconductor device, comprising:
- a laser beam generating unit for generating a laser beam;
- an optical fiber having an aperture at a tip end, coupled to said laser beam generating unit, for receiving said laser beam to heat an area of said semiconductor device under said aperture;
- and
- an electrical deviation detector, connected a first terminal of said semiconductor device, for detecting an electrical deviation at said first terminal caused by heating the area of said semiconductor device.
Dependencies are inferred from the claim text.