Semiconductor device having a stress relieving mechanism
AssigneeHitachi, Ltd.
InventorsMasahiko Ogino, Akira Nagai, Shuji Eguchi, Toshiaki Ishii, Masanori Segawa, Haruo Akahoshi, Akio Takahashi, Takao Miwa, Naotaka Tanaka, Ichirou Anjou
Life of this patent
Estimating the term…