Copolymer resin of maleimide and alicyclic olefin-based monomers, photoresist containing the copolymer resin and the preparation thereof
AssigneeHyundai Electronics Industries Co., Ltd.
InventorJae Chang Jung
Life of this patent
Estimating the term…
Abstract
The present invention relates to a novel copolymer resin of maleimide and alicyclic olefin-based monomers, a photoresist containing the copolymer and a process for the preparation thereof. More specifically, the present invention relates to a novel copolymer resin of maleimide and alicyclic olefin-based monomers useful for a photoresist usable lithography process using ultra-short wavelength light source such as KrF(.lambda.=248 .mu.m), ArF(.lambda.=193 .mu.m), X-ray, ion beam, E-beam and EUV (Extreme Ultra Violet) which is a potentially applicable technology to the fabrication of a fine circuit of a highly integrated semiconductor device.
Claims13
A novel copolymer resin of maleimide and alicylic olefin-based monomers, said copolymer having the formula (2):
- ##STR12## wherein R.sub.1 represents a primary, secondary or tertiary aliphatic alcohol having from 1 to 10 carbon atoms and X:Y:Z=100:60-95:5-40 by mole ratio.
A process for preparing a copolymer resin of the formula (6):
- ##STR15## said process comprising the steps of:
- (i) dissolving N-(2-hydroxyethyl)maleimide, t-butyl 5-norbornene-2-carboxylate and 5-norbornene-2-carboxylic acid in a solvent;
- (ii) adding a polymerization initiator to the resultantsolution of step (i) to produce a reaction solution;
- (iii) laying said reaction solution under nitrogen or argon atmosphere to produce a reaction product;
- and
- (iv) precipitating and drying said reaction product to produce said copolymer resin.
A process for preparing a copolymer resin of the formula (8):
- ##STR16## wherein, X:Y:Z=100:60-95:5-40 by mole ratio. said process comprising the steps of:
- (i) dissolving N-(3-hydroxypropyl)maleimide, t-butyl 5-norbornene-2-carboxylate and 5-norbornene-2-carboxylic acid in a solvent;
- (ii) adding a polymerization initiator to the resultant solution of step (ii) to produce a reaction solution;
- (iii) laying said reaction solution under nitrogen or argon atmosphere to produce a reaction product;
- and
- (iv) precipitating and drying said reaction product to produce said copolymer resin.
Dependencies are inferred from the claim text.