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US 6,027,705 AGranted
Method for producing a higher silane
AssigneeShowa Denko K.K.
InventorsYu Kitsuno, Kotaro Yano, Syoichi Tazawa, Shinya Matsuhira, Tetsuo Nakajo
Life of this patent
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Abstract
A method for producing tri- or higher-silane from mono- or lower-silane characterized by reacting a lower silane in the first reaction zone and reacting a portion or all of the reaction product thereof in a reaction zone of the second or subsequent reaction zone.
Claims13
A method for producing tri- or higher-silane from mono- or di-silane, comprising the steps of:
- conducting a first reaction of a first silane mainly comprised of monosilane and/or disilane in a first reaction zone at a first temperature higher than room temperature to form a second silane including an increased amount of di- or higher silane than said first silane, and then
- conducting a second reaction of a portion or all of the reaction product of said first reaction at a second temperature higher than ambient temperature in a second or subsequent reaction zone to form a third silane including tri- or higher-silane, provided that at least when all the reaction product of the first reaction is subjected to said second reaction, said second temperature is lower than said first temperature.
A method for producing a higher silane of tri- or higher-silane from a lower silane of mono- or di-silane in a reaction system, comprising:
- a first step of introducing and reacting the lower silane in a first reaction zone, separating the obtained reaction product in a first condenser to a non-condensed substance mainly comprised of hydrogen gas and monosilane and a condensed substance having a boiling point higher than said non-condensed substance, and separating the hydrogen gas from the non-condensed substance in a second condenser to release the same out of the reaction system and return the component mainly comprised of monosilane to the first reaction zone;
- a second step of introducing, into a second reaction zone, said condensed substance obtained in the first condenser in the first step, to react the same therein, separating in a third condenser the obtained reaction product in said second reaction zone to a non-condensed substance mainly comprised of monosilane and a condensed substance, and returning the non-condensed substance to the second condenser or the first reaction zone in said first step or the second reaction zone;
- and
- a third step of charging and fractioning, in a distillation column, the condensed substance separated in said third condenser to recover the higher silane as a final product, returning a component mainly composed of monosilane to the first reaction zone in said first step, and returning a component mainly comprised of disilane to the second reaction zone in the second step.
1 more element
Dependencies are inferred from the claim text.