Process and apparatus for producing phosphine-containing gas
AssigneeDegesch de Chile LTDA
InventorsFranziskus Horn Feja, Christoph Reichmuth
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Abstract
A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolyzable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO.sub.2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.
Claims47
A process for generating a mixture of phosphine and diluent gas or gases, wherein a hydrolysable metal phosphide selected from the group consisting of magnesium phosphide, aluminum phosphide and calcium phosphide is contacted with liquid water in a generating space, whereby the metal phosphide is hydrolysed to release phosphine which is withdrawn from the generating space and is, in the event that the phosphine withdrawn from the generating space has an ignitable composition, diluted from the time of its generation to its reaching its locality of use with a diluent gas to a composition which is non-ignitable under the conditions of use, wherein the metal phosphide is released into the liquid water in a free-flowing particulate form, composed of loose metal phosphide particles predominantly in a particle size range of about 0.1 mm to 2.5 mm, essentially free of metal phosphide dust substantially smaller than 0.1 mm and of hydrolysis retarding agents and essentially free of hydrophobic substance in the form of coatings or hydrophobising additives, and, in the event that dilution commences already in the generating space, under an atmosphere comprising a carrier gas inert to the phosphine, forming at least part of the diluent gas.
A process for generating a mixture of phosphine gas and diluent gas or gases, comprising:
- feeding a hydrolyzable metal phosphide, selected from the group consisting of magnesium phosphide, aluminum phosphide and calcium phosphide, in particulate form into aqueous liquor in a generating space;
- hydrolyzing the metal phosphide to phosphine gas predominantly within seconds and completely within less than 3 minutes from a time of entering the aqueous liquor;
- withdrawing the phosphine gas from the generating space;
- and in the event that the phosphine gas has an ignitable composition, diluting the phosphine gas with a diluent gas to a composition which is non-ignitable under conditions of use.
Dependencies are inferred from the claim text.