Light modulating microdevice and method

A method for producing a light modulator, comprising the steps of:

• (a) providing base means containing control circuit means for the light modulator and providing electrode means on said base means;
• (b) providing a sacrificial layer means on said base means and electrode means;
• (c) patterning said sacrificial layer means, at least part of a shape of which is complementary to a hinge of said light modulator and downwardly extends to said base means;
• (d) providing first metal layer means on said sacrificial layer means and said base means for constituting said hinge;
• (e) providing second metal layer means on said first metal layer means for constituting a mirror of said light modulator;
• and
• (f) removing said sacrificial layer means.

A method for producing a light modulator, comprising the steps of:

• (a) providing base means containing control circuit means for the light modulator and providing electrode means on said base means;
• (b) providing first sacrificial layer means on said base means and electrode means;
• (c) patterning said first sacrificial layer means, at least part of a shape of which is complementary to a hinge of said light modulator and downwardly extends to said base means;
• (d) providing first metal layer means on said first sacrificial layer means and said base means for constituting said hinge;
• (e) providing second sacrificial layer means on part of said first metal layer means;
• (g) providing second metal layer means on said first metal layer means and on said second sacrificial layer means for constituting a mirror of said light modulator;
• and
• (h) removing said first and second sacrificial layer means.

A method for producing a light modulator, comprising the steps of:

• (a) providing base means containing control circuit means for the light modulator and providing electrode means on said base means;
• (b) providing first sacrificial layer means on said base means and electrode means, said first sacrificial layer means having at least part of a shape thereof complementary to a lower part of a hinge of said light modulator and downwardly extending to said base means;
• (c) providing first metal layer means on said first sacrificial layer means and said base means for constituting the lower part of said hinge;
• (d) providing second sacrificial layer means on part of said first metal layer means;
• (e) providing second metal layer means on said first metal layer means and on said second sacrificial layer means for constituting an upper part of said hinge;
• (f) providing third sacrificial layer means on said second metal layer means and on said first sacrificial layer means;
• (g) providing third metal layer means on said second metal layer means and on said third sacrificial layer means for constituting a mirror of said light modulator;
• and
• (h) removing said first, second and third sacrificial layer means.