Thin SiO.sub.2 films, a process for producing them and their use
AssigneeInstitute fuer neue Materialen gemeinnuetzige GmbH
InventorsHelmut Schmidt, Martin Mennig, Gerhard Jonschker, Navin Suyal
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AssigneeInstitute fuer neue Materialen gemeinnuetzige GmbH
InventorsHelmut Schmidt, Martin Mennig, Gerhard Jonschker, Navin Suyal
Estimating the term…
Thin SiO.sub.2 films can be produced by hydrolysis and condensation of a) 40 to 100% by weight of one or more silanes of general formula (I) R.sub.x --Si--A.sub.4-x (I) in which the groups A are identical or different and stand for hydroxyl groups or hydrolytically separable groups, the groups R are identical or different and stand for hydrolytically non-separable groups, x has the value 0, 1, 2 or 3, x being not less than 1 for 70% by moles of said silanes; b) optionally in the presence of 0 to 50% by weight of colloidal SiO.sub.2 and/or c) 0 to 10% by weight of organic binder. The viscous sol thus obtained is worked into a gel film which is heat-treated.
A process for the production of a thin SiO.sub.2 film which comprises:
A thin SiO.sub.2 film produced by a process wherein:
Dependencies are inferred from the claim text.