Microfabrication of cantilevers using sacrificial templates
AssigneeThe Regents of the University of California
InventorsMario B. Viani, Paul Hansma, Ami Chand, Mark A. Wendman, Hal J. Morrett
Life of this patent
Estimating the term…
Abstract
A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial cantilever, followed by removal of the sacrificial cantilever.
Claims20
A method for fabricating at least one cantilever for an atomic force microscope formed of a first material, comprising:
- forming a structure integral with a chip having an outer surface, at least a portion thereof being in the desired shape of said cantilever and serving as a sacrificial template for said cantilever, said template and chip being formed of a material different from said first material;
- depositing said first material on said template;
- and
- removing said template without removing said first material, whereby to yield a cantilever of said first material having said desired shape.
A method for fabricating at least one metallic cantilever, comprising:
- forming a structure having an outer surface, at least a portion thereof being in the desired shape of said metallic cantilever, said structure being formed of a material selected from silicon dioxide, silicon nitride, and silicon, said structure being integral with a silicon chip;
- depositing said metal on said structure;
- and
- removing said structure without removing said metal, whereby to yield a chip-metallic cantilever assembly.
A method for fabricating at least one cantilever for an atomic force microscope formed of a metallic material, comprising:
- forming a structure having an outer surface larger in its dimensions than the dimensions of the desired shape of said cantilever;
- depositing said metallic material on said structure;
- depositing at least one platform on at least a portion of said first material whereby the desired cantilever shape is not covered by said platform;
- and
- removing said structure without removing said metallic material, whereby to yield said cantilever.
A metallic cantilever for an atomic force microscope supported on a chip, said cantilever having a length of 10 .mu.m or less, a width of 4 .mu.m or less;
- and a thickness of 70 nm or less.
A metallic cantilever for an atomic force microscope supported on a chip and a platform on said cantilever integral therewith covering only a portion of said cantilever whereby the portion of said cantilever not covered by said platform has a length of 10 .mu.m or less.
A method for fabricating at least one cantilever for an atomic force microscope formed of a first material, comprising:
- forming a structure having an outer surface, at least a portion thereof being in the desired shape of said cantilever, said structure being formed of a material different from said first material and including a platform integral with a chip;
- depositing said first material on said structure;
- and
- removing said structure without removing said first material, whereby to yield said cantilever.
A method for fabricating at least one metallic cantilever, comprising:
- forming a structure having an outer surface, at least a portion thereof being nonplanar and in the desired shape of said metallic cantilever, said structure being formed of a material selected from silicon dioxide, silicon nitride, and silicon, said structure being integral with a silicon chip;
- depositing said metal on said structure;
- and
- removing said structure without removing said metal, whereby to yield a chip-metallic cantilever assembly in which said cantilever is nonplanar.
A method for fabricating at least one cantilever for an atomic force microscope formed of a first material, comprising:
- forming a structure having an outer surface, at least a portion thereof being in the desired shape of said cantilever, said structure being formed of a material different from said first material and including a platform integral with a chip;
- depositing said first material on said structure;
- and
- removing said structure using an etchant therefor without removing said first material, said platform being formed of silicon sufficiently doped with boron to limit etching by said etchant, whereby to yield said cantilever.
Dependencies are inferred from the claim text.