Micromechanical potentiometric sensors

A method for detecting and measuring chemical and physical parameters in a sample of monitored media, comprising the steps of:

• providing a transducer base comprising:
• at least one cantilevered spring element attached to said base;
• and
• at least one surface having a coated region on said spring element;
• providing at least one material, said material accumulates a surface charge by ionizing in response to said parameters in said sample placeable on or in close proximity to said coated region;
• coating said at least one material on said coated region;
• exposing said at least one material to said sample, said sample placed on or in close proximity to said coated region;
• providing a means for detecting a deflection of said cantilevered spring element due to mechanical stresses established by said surface charge on said at least one material on said surface of said spring element;
• and
• detecting said deflection of said spring element.

An apparatus for detecting and measuring physical and chemical parameters in a sample of monitored media, comprising:

• a transducer base;
• a plurality of cantilevered spring elements attached to said base, each of said spring elements comprising:
• a surface having at least one coated region;
• at least one material on said at least one coated region, said material accumulates a first surface charge in response to said parameter in said sample placed on or in close proximity to said coated region;
• and
• a second surface on said spring element having a surface charge different than said first surface charge;
• and
• a plurality of means for detecting deflections of each of said spring elements due to mechanical stresses established by different surface charges on said spring element surfaces, each means for detecting deflections associated with a respective one of said spring elements.