Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
AssigneeAdvanced Refractory Technologies, Inc.
InventorsArvind Goel, Craig Anthony Outten
Life of this patent
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Abstract
A diamond-like carbon-containing material useful as a coating for electronic devices including field emission devices and color television tubes, the coatings having both low secondary electron emission coefficients of less than unity and electrical resistivity tunable over a range of from about 10 e.sup.-2 to about 10 e.sup.16.
Claims23
In a device having an electron source and a target arranged so that electrons from the source impinge on the target, and a passive element operationally positioned with respect to either the source or the target so that electrons from the source may impinge on the passive element and secondary electrons emitted from the passive element impinge on the target, the improvement comprising:
- a coating comprising carbon and silicon on a surface of the passive element for reducing the secondary electron emission coefficient of the surface to less than about one.
In a device having an electron source, a target arranged so that electrons from the source impinge on the target, and a passive element positioned so that electrons from the source may impinge on the passive element and secondary electrons emitted from the passive element impinge on the target, the improvement comprising:
- a coating comprising carbon and silicon on a surface of the passive element for reducing the secondary electron emission coefficient of the surface to less than about one, wherein the coating has a thickness of from about 0.02 to about 0.15 microns.
Dependencies are inferred from the claim text.