# US 6,011,405 A · Apparatus and method for probing multiple integrated circuit dice in a semiconductor wafer

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- Number: US 6,011,405 A
- Document ID: US6011405A
- Status: Granted
- Kind: A
- Application number: 08/959,065
- Filed: 1997-10-28
- Granted: 2000-01-04
- Earliest claimed: 1997-10-28
- Assignees: QualiTau, Inc.
- Inventors: Robert M. Sikora
- Web page: https://patentgrep.com/patent/US6011405A

## CPC

- G01R 31/2886: {Features relating to contacting the IC under test, e.g. probe heads; chucks (G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06)}
- G01R 31/2887: {involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

Multiple integrated circuit dice can be simultaneously engaged for probe testing by providing a wedge card having a plurality of needle probes mounted thereon and extending along two orthogonal directions with the probe cards being planarized below a first major surface. Each wedge card can then engage at least two integrated circuits simultaneously. The wedge cards and manipulators can be mounted on a probe card around a central opening for testing integrated circuit die through the opening, alternatively, the probe card and manipulator can be mounted to two movable rods attached to respective pairs of manipulators mounted on a platen around the semiconductor wafer with the rods and manipulators moving the wedge card and manipulator along two axes (X,Y) with the wedge card manipulator moving the wedge card in a third axis (Z). Multiple integrated circuits can be simultaneously tested, and the manipulators for controlling the needle probes on a wedge card are distributed around the semiconductor wafer and away from heat generated by the integrated circuits undergoing tests. Further, the distributed manipulators can control a plurality of wedge cards in the two axes (X,Y).

## Claims

### Claim 1

A multiple probe wedge card for engaging contacts on a plurality of integrated circuit dice comprising:
a card body having two opposing major surfaces,
a plurality of needle probes mounted on and extending from said card body below a first major surface and aligned in two orthogonal directions (X, Y) with the probes being planarized below a first major surface,
a manipulator contact centrally disposed on a second major surface whereby said plurality of needle probes are extendable from at least two sides of said body for simultaneously engaging at least two integrated circuits, and
a manipulator attached to said manipulator contact for individually manipulating said card in one axis (Z).

### Claim 2 (depends on 1)

The multiple probe wedge card as defined by claim 1 and further including a probe card for supporting a plurality of wedge cards and manipulators, said probe card having an opening through which needle probes extend for contacting integrated circuit dice, the manipulators for individual wedge cards being mounted on said probe card adjacent to said opening.

### Claim 3 (depends on 1)

The multiple probe wedge card as defined by claim 1, and further including a platen for positioning around a semiconductor wafer, said platen including a first support rod and means for moving the first support rod in a first axis (X), a second support rod and means for moving the second support rod in a second axis (Y), said manipulator being mounted to said first support rod and second support rod and movable along the first axis and the second axis thereby, the manipulator providing movement along a third axis (Z).

### Claim 4 (depends on 2)

The multiple probe wedge card as defined by claim 2 wherein said needle probes extend from four sides of said body for simultaneously engaging four integrated circuit dice.

### Claim 5

A method of probing multiple integrated circuit dice on a semiconductor wafer comprising the steps of:
a) providing a wedge card body having two opposing major surfaces with a plurality of needle probes mounted on and extending from said card body and aligned in two orthogonal directions (X, Y) with the probes planarized below a first major surface,
b) providing a manipulator contact centrally disposed on a second major surface whereby said plurality of needle probes are extendable form at least two side of said body for engaging at least two integrated circuits simultaneously, and
c) providing a manipulator for engaging the manipulator contact and moving the card body along one axis through the manipulator contact.

### Claim 6 (depends on 5)

The method as defined by claim 5, wherein the manipulator moves the card body in three axes (X,Y,Z).

### Claim 7 (depends on 5)

The method as defined by claim 5 and further including the steps of:
d) providing a platen which is positionable around a semiconductor wafer undergoing tests, a pair of manipulators mounted to the platen and movable along one axis (X), a second pair of manipulators mounted on said platen and movable along a second axis (Y), a first rod engaging the first pair of manipulators and a second rod engaging the second pair of manipulators, the card body being coupled to the first and second rods and movable along two axes (X,Y) thereby.