Semiconductor device with increased maximum terminal voltage
AssigneeIntersil Corporation
InventorJames D. Beasom
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntersil Corporation
InventorJames D. Beasom
Estimating the term…
In a semiconductor island structure with passive side isolation, a method and structure for reducing corner breakdown where a device conductor crosses the edge of the island. The decrease in the field strength at the island edge between the conductor and the adjacent conducting region may be achieved by increasing the depth of the insulator beneath the conductor where it crosses the island edge without the necessity for increasing the thickness of the layer of insulation applied directly to the surface of the island by the use of a second or higher level interconnect, e.g., the conventional deposition of one or more additional layers of insulation over the device terminal to increase the spacing between the conductor and the surface of the island. In this way the process by which the device is constructed may remain unchanged. The decrease in the field strength at the island edge may alternatively or in addition be achieved by increasing the thickness of the insulator providing lateral isolation without increasing the thickness of the substrate isolation by the use of lateral trench isolation formed independently of the substrate isolation.
A method of increasing maximum terminal voltage of a semiconductor island passively isolated from an adjacent conductive region comprising the steps of:
In an integrated circuit including (i) a semiconductor island having a device, (ii) a lateral insulator, (iii) an adjacent conducting region separated from the island by the lateral insulator, and (iv) a device terminal conductor overlying a portion of the device, the lateral insulator and the adjacent conducting region,
In a semiconductor device having an island with passive side isolation from a conductive region, insulation applied directly to the surface of the island in selected areas thereof, and a conductor which extends over a lateral edge of the island and the adjacent conductive region separated from the surface of the island by the insulation, the method of increasing the maximum terminal voltage of the device by the step of increasing the thickness of the insulation between the conductor and the surface of the island adjacent the lateral edge thereof and the adjacent conductive region without increasing the thickness of the insulation applied directly to the surface of the island in other areas, to thereby reduce corner breakdown due to the portion of the field which passes through the island between (i) the conductor and (ii) the adjacent conductive region.
A method of increasing the maximum terminal voltage of structures formed in islands with passive side isolation and a layer of insulation applied directly to the surface of the islands in selected areas including the area where the conductor crosses the island edge comprising the step of increasing the thickness of an insulation between the conductor with the largest potential difference to the adjacent conductive region in the area where the conductor crosses the island edge without increasing the thickness on the layer of insulation applied directly to the surface of the island in other areas thereof.
A method comprising the steps of:
In a semiconductor device having a junction and an island contact where the device is within a semiconductor island passively isolated from an adjacent conductive region and where a contact conductor passes over the edge of the island separated from the surface thereof by a layer of insulation, a method of increasing the maximum terminal voltage of the device by the step of increasing the thickness of the insulation separating the contact conductor from the island surface,
An IC comprising:
In an integrated circuit including (i) a semiconductor island having a device, (ii) a lateral insulator, (iii) an adjacent conducting region separated from the island by the lateral insulator, and (iv) a device terminal conductor overlying a portion of the device, the lateral insulator and the adjacent conducting region,
Dependencies are inferred from the claim text.