Method for generating and maintaining a glow plasma discharge
AssigneeThe Trustees of the Stevens Institute of Technology
InventorsErich E. Kunhardt, Kurt H. Becker
Life of this patent
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Abstract
A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.
Claims15
A method of stabilizing glow-to-arc transition for a discharge plasma comprising the steps of:
- positioning electrodes in facing relation;
- providing a perforated dielectric having a plurality of current limiting micro-channel apertures therethrough for limiting current density from increasing above glow-to-arc transition;
- and
- covering one of the electrodes with the perforated dielectric.
A method of generating and maintaining a glow plasma discharge comprising:
- positioning opposing electrodes in a facing relationship with a space therebetween;
- providing a dielectric;
- forming a plurality of apertures sized to limit current density from increasing above glow-to-arc transition;
- positioning the dielectric between the opposing electrodes to partially occupy the space therebetween;
- and
- generating an electric field between the opposing electrodes.
A method of generating and maintaining a glow plasma discharge comprising:
- providing a first electrode;
- depositing a dielectric on the first electrode to form a plurality of apertures of micron dimensions sized to limit current density from increasing above glow-to-arc transition;
- providing a second electrode in facing relation to the first electrode;
- and
- generating an electric field between the electrodes.
Dependencies are inferred from the claim text.