Photosensitive ceramics green sheet
AssigneeToray Industries, Inc.
InventorsTakaki Masaki, Takao Kitagawa, Akiko Yoshimura, Keiji Iwanaga
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Abstract
A ceramics green sheet which is suitably used for producing sintered ceramics substrates and the like is disclosed. The ceramics green sheet according to the present invention includes a ceramics powder, a photoinitiator, a UV absorber such as photoinitiation inhibitor organic dyes and inorganic powders, and a photosensitive resin composition. The ceramics green sheet according to the present invention has an advantage that via holes and through holes may be very easily formed with high precision, and fine holes may be formed reliably and inexpensively.
Claims13
A ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance at a wavelength of 350-450 nm, a photoinitiator and a photosensitive resin composition, wherein said ceramics powder is covered with said UV absorber.
A ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance at a wavelength of 350-450 nm, a photoinitiator, a photosensitive resin composition and a stabilizer.
A ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance wavelength of 350-450 nm, a photoinitiator and a photosensitive resin composition, which has a thickness of 5-500 .mu.m.
A ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance at a wavelength of 350-450 nm, a photoinitiator and a photosensitive resin composition, wherein said photosensitive resin composition includes a compound selected from the group consisting of aromatic diazo compounds, aromatic azide compounds, organic halogen compounds, inorganic salts of diazo compounds, complexes of diazo compounds and inorganic acids, quinone diazo compounds including a polymer binder and quinodiazo compounds bonded to a polymer binder.
A ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance at a wavelength of 350-450 nm, a photoinitiator and a photosensitive resin composition, wherein said inorganic powders are selected from the group consisting of carbon, carbides, borides and nitrides.
A ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance at a wavelength of 350-450 nm, a photoinitiator and a photosensitive resin composition wherein said inorganic powder is added in an amount of between 0.2-5% by weight based on the weight of the ceramics powder.
A multilayer ceramics green sheet produced by exposing and developing a ceramics green sheet comprising a mixture of a ceramics powder, a UV absorber selected from the group consisting of organic dyes and inorganic powders having an absorbance at a wavelength of 350-450 nm, a photoinitiator and a photosensitive resin composition, attaching an electroconductive material, and then laminating a plurality of the resulting sheets.
Dependencies are inferred from the claim text.