Apparatus for the rapid evacuation of a vacuum chamber
AssigneeBalzers und Leybold Deutschland Holding AG
InventorsThomas Gebele, Wolfgang Buschbeck
Life of this patent
Estimating the term…
Abstract
A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a second vacuum valve (12) therein. A blowout valve (17) is connected to the connecting line (20) between the first pump (14) and the second valve (12). A secondary intake line (19) having therein a third vacuum valve (13) is connected between the vacuum chamber (5) and the intake of the second vacuum pump (15).
Claims4
Apparatus for evacuating a vacuum chamber, said apparatus comprising
- a first vacuum pump having an intake port, a working chamber, and an output port, said intake port being connected to said vacuum chamber by a first intake line through which gas is withdrawn from the vacuum chamber,
- a first vacuum valve installed in said first intake line, said first vacuum valve selectively permitting and blocking flow of gas through said first intake line,
- a second vacuum pump having an intake port connected to said output port of said first pump by a connecting line,
- a second vacuum valve installed in said connecting line between said first vacuum pump and said second vacuum pump,
- a blow-out valve connected to said connecting line between said first vacuum pump and said second vacuum valve,
- a secondary intake line connected to the intake port of the second vacuum pump and to the vacuum chamber, and
- a third vacuum valve installed in said secondary intake line, and selectively permitting and blocking gas flow between the vacuum chamber and the second vacuum pump.
Dependencies are inferred from the claim text.