Cathode structure for sputter ion pump
AssigneeDuniway Stockroom Corp.
InventorSherman Rutherford
Life of this patent
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Abstract
A sputter ion pump including an anode assembly comprising a plurality of hollow anode cells and cathode surfaces having open spirals disposed at each end of said anode cells.
Claims9
A sputter ion pump comprising an evacuated envelope with spaced cathodes of getter material, and an anode having a plurality of hollow cells disposed between said cathodes within said envelope, characterized in that at least one of the cathodes comprises open support means for supporting a plurality of open spirals formed with strips of getter material, one of said open spirals being located opposite the end of each of said anodes to provide a plurality of gas discharge paths through said open spirals within said envelope.
Dependencies are inferred from the claim text.