Method and apparatus for controlling the size of a laser beam

Abstract

A method of controlling the size of a laser beam comprises the steps of generating the laser beam with a laser, focusing the laser beam, directing the laser beam to a target, directing a portion of the laser beam to an optical detector which generates a signal representative of a fluence distribution of the laser beam, and adjusting a focal point of the laser beam based on the measured fluence distribution to control the size of the laser beam on the target. The method can be carried out with an apparatus which comprises a beam splitter which divides the laser beam into a first portion and a second portion, a lens which focuses the first portion of the laser beam for incidence on a target, a detector which receives the second portion of the laser beam and which generates a signal representative of a spatial energy distribution of the laser beam, a digitizer which digitizes the signal from the detector, a data analyzer which receives the digitized signal from the digitizer and which calculates a fluence distribution of the laser beam, and a lens controller for adjusting a position of the lens with respect to the target based on the fluence distribution.

Dependencies are inferred from the claim text.