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US 6,002,523 AGranted
Laser illumination method
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
Life of this patent
Estimating the term…
Abstract
A beam homogenizer at least includes a first optical lens for dividing a light beam into N(n'-1) beams in a vertical direction, a second optical lens for dividing the light beam into (2n+1) beams in a horizontal direction, a third optical lens for recombining the beams that are divided in the vertical and horizontal directions into (n'-1) beams while superimposing the (n'-1) beams so that they are deviated from each other in the horizontal direction, and a fourth optical lens for recombining the beams that are divided in the vertical direction.
Claims56
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n'-1) beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n+1) beams in a horizontal direction;
- (n'-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n'-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n'-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3, and n' is an integer that satisfies 3.ltoreq.n'.ltoreq.n.
7 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n-1)beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n+1) beams in a horizontal direction;
- (n-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n-1)in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3.
7 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n'-1) beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n) beams in a horizontal direction;
- (n'-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n'-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n'-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3, and n' is an integer that satisfies 3.ltoreq.n'.ltoreq.n.
7 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n-1) beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n) beams in a horizontal direction;
- (n-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3.
7 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n'-1) beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n+1) beams in a horizontal direction;
- (n'-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n'-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses;
- wherein N is a natural number, n is an integer that is greater than or equal to 3, and n' is an integer that satisfies 3.ltoreq.n'.ltoreq.n;
- and
- wherein sum of a focal length of the cylindrical lens group and a focal length of the (n'-1) cylindrical lenses is approximately equal to an interval between the cylindrical lens group and the (n'-1) cylindrical lenses.
9 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n-1) beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n+1) beams in a horizontal direction;
- (n-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses;
- wherein N is a natural number, n is an integer that is greater than or equal to 3;
- and
- wherein sum of a focal length of the cylindrical lens group and a focal length of the (n-1) cylindrical lenses is approximately equal to an interval between the cylindrical lens group and the (n-1) cylindrical lenses.
9 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n'-1) beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n) beams in a horizontal direction:
- (n'-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n'-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses;
- wherein N is a natural number, n is an integer that is greater than or equal to 3, and n' is an integer that satisfies 3.ltoreq.n'<n;
- and
- wherein sum of a focal length of the cylindrical lens group and a focal length of the (n'-1) cylindrical lenses is approximately equal to an interval between the cylindrical lens group and the (n'-1) cylindrical lenses.
9 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- an optical lens for dividing the laser beam into N(n-1)beams in a vertical direction;
- a cylindrical lens group for dividing the laser beam into (2n) beams in a horizontal direction;
- (n-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system, wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses;
- wherein N is a natural number, n is an integer that is greater than or equal to 3;
- and
- wherein sum of a focal length of the cylindrical lens group and a focal length of the (n-1) cylindrical lenses is approximately equal to an interval between the cylindrical lens group and the (n-1) cylindrical lenses.
8 more elements
A laser illumination method comprising the steps of causing a laser beam to pass through an optical system comprising:
- a first cylindrical lens group for dividing the laser beam into N(n'-1) beams in a vertical direction:
- a second cylindrical lens group for dividing the laser beam into (2n+1) beams in a horizontal direction;
- (n'-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n'-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n'-1) cylindrical lenses;
- wherein N is a natural number, n is an integer that is greater than or equal to 3, and n' is an integer that satisfies 3.ltoreq.n'<n.
6 more elements
A laser illumination method comprising the steps of causing a laser beam to pass through an optical system comprising:
- a first cylindrical lens group for dividing the laser beam into N(n-1) beams in a vertical direction;
- a second cylindrical lens group for dividing the laser beam into (2n+1) beams in a horizontal direction;
- (n-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n-1)in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3.
6 more elements
A laser illumination method comprising the steps of:
- causing a laser beam to pass through an optical system comprising:
- a first cylindrical lens group for dividing the laser beam into N(n'-1) beams in a vertical direction;
- a second cylindrical lens group for dividing the laser beam into (2n) beams in a horizontal direction;
- (n'-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n'-1)in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n'-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3, and n' is an integer that satisfies 3.ltoreq.n'<n.
7 more elements
A laser illumination method comprising the steps of causing a laser beam to pass through an optical system comprising:
- a first cylindrical lens group for dividing the laser beam into N(n-1)beams in a vertical direction;
- a second cylindrical lens group for dividing the laser beam into (2n) beams in a horizontal direction;
- (n-1) cylindrical lenses for recombining the beams that are divided in the horizontal direction while superimposing the divided beams so that they are deviated from each other by d/(n-1) in the horizontal direction;
- and
- a cylindrical lens for recombining the beams that are divided in the vertical direction;
- and
- illuminating an illumination surface with the laser beam that is output from the optical system,
- wherein d is defined as an interval of peaks of an interference fringe that is formed on the illumination surface by a beam that has passed through one of the (n-1) cylindrical lenses and
- wherein N is a natural number, n is an integer that is greater than or equal to 3.
6 more elements
Dependencies are inferred from the claim text.