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US 6,002,263 AGranted
Probe station having inner and outer shielding
AssigneeCascade Microtech, Inc.
InventorsRon A. Peters, Leonard A. Hayden, Jeffrey A. Hawkins, R. Mark Dougherty
Life of this patent
Estimating the term…
Abstract
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
Claims13
A probe station for probing a test device, said probe station comprising:
- (a) a chuck assembly having a chuck assembly element with a supporting surface for supporting said test device during probing thereof;
- (b) an electrically conductive outer shield enclosure at least partially enclosing said chuck assembly element and insulated therefrom;
- (c) an electrically conductive inner shield enclosure interposed between and insulated from said outer shield enclosure and said chuck assembly element, and at least partially enclosing said chuck assembly element;
- (d) respective electrical conductors connected electrically to said chuck assembly element and said inner shield enclosure, respectively, causing said inner shield enclosure and said chuck assembly element to have respective potentials independent of each other;
- (e) said inner shield having a first portion substantially fixedly mounted with respect to said outer shield enclosure and a second portion movably mounted with respect to said outer shield enclosure, said chuck assembly and said second portion being interconnected so as to move in unison with respect to said first portion.
2 more elements
A probe station for probing a test device, said probe station comprising:
- (a) a chuck assembly having respective first and second elements electrically insulated from each other, the first element including a supporting surface for supporting said test device during probing thereof, and the second element having conductive material in spaced relationship to said supporting surface;
- (b) an electrically conductive outer shield enclosure at least partially enclosing said first and second elements and insulated therefrom;
- (c) respective electrical conductors connected to said first and second elements causing said first and second elements to have substantially equal potentials to minimize leakage currents therebetween;
- (d) an electrically conductive inner shield enclosure interposed between and insulated from said outer shield enclosure and said first and second elements, and at least partially enclosing said first and second elements;
- and
- (e) a further electrical conductor connected electrically to said inner shield enclosure causing said inner shield enclosure to have a potential different from the potentials of said first and second elements, said further electrical conductor not being electrically connected to said outer shield enclosure.
3 more elements
Dependencies are inferred from the claim text.