Rigid thin windows for vacuum applications
AssigneeThe Regents of the University of California
InventorsGlenn Allyn Meyer, Dino R. Ciarlo, Booth Richard Myers, Hao-Lin Chen, George Wakalopulos
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Abstract
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.
Claims20
A method of making a thin window for vacuum applications, comprising:
- selecting a substrate comprising silicon;
- forming an etch stop layer on one side of the substrate;
- forming a continuous protective barrier layer on the etch stop layer of a material different from the etch stop layer;
- removing portions of the silicon substrate such that a bilayer window comprising the etch stop layer and protective barrier layer is formed, and such that a plurality of support ribs comprising silicon are formed in contact with the etch stop layer and running the width of the window.
A thin window for vacuum applications, comprising:
- a first layer effective as an etch stop in silicon etching, comprising a material selected from the group consisting of doped silicon, and conductive carbides, nitrides, and borides;
- a continuous protective barrier layer formed on the first layer, comprising a material different from the etch stop layer and selected from the group consisting of borides, carbides, nitrides, and oxides, wherein the first layer and barrier layer form a window;
- and
- a plurality of support ribs comprising silicon formed in contact with the first layer and running the width of the bilayer window.
Dependencies are inferred from the claim text.