Abrasive dresser for polishing disc of chemical-mechanical polisher

Abstract

With an abrasive dresser for a polishing disc of a chemical-mechanical polisher for abrading a flat rotatable polishing disc of a chemical-mechanical polisher which supplies a chemical polishing agent to the surface of the polishing disc to polish the surface of an article on top of the polishing disc, a sectional shape of an abrasive surface being a peripheral portion of a flat disc shaped base member which protrudes upwards over a predetermined width with an abrasive grit distributed substantially uniformly over and affixed to the surface thereof, is formed as a convex circular arc curved surface. In this way, the portion of contact with the polishing disc of the chemical-mechanical polisher becomes surface contact, thereby enabling a reduction in wear during use and an increase in life, together with an increase in the efficiency of abrading the polishing disc.

Dependencies are inferred from the claim text.