System for applying recipe of semiconductor manufacturing apparatus

A system for applying recipes of semiconductor manufacturing apparatuses, comprising:

• a plurality of independent semiconductor manufacturing apparatuses configured to perform a same manufacturing function;
• a plurality of apparatus controllers configured to individually control said respective semiconductor manufacturing apparatuses and having display screens;
• a host controller commonly connected to said apparatus controllers through a first set of channels, said host controller having a storage device configured to store process recipes corresponding to said manufacturing function;
• and
• a group controller commonly connected to said apparatus controllers through a second set of channels different from said first set of channels, said group controller being connected to said host controller through a dedicated channel to directly exchange information with said host controller,
• wherein said host controller is configured to write/read out a process recipe in/from said group controller through the dedicated channel, and is configured to read out a process recipe history from said group controller through the dedicated channel, and
• said group controller stores a history of a process recipe used by each of said semiconductor manufacturing apparatuses and comprises selection means capable of selecting one of the following modes:
• a. an apparatus mode in which process recipes are stored in said apparatus controllers, and an operator selects a recipe to be executed from the process recipes displayed on the display screen of an apparatus controller to be operated by said operator;
• b. a recipe management mode in which process recipes are stored in said group controller, and a recipe to be executed is selected by designating an execution recipe for said host controller;
• and
• c. a host mode in which process recipes are stored in said host controller, and said host controller sends a process recipe to said apparatus controllers, writes/reads out a recipe in/from said group controller through the dedicated channel, and reads out a recipe history from said group controller through the dedicated channel.

A system for applying process recipes, comprising:

• a plurality of semiconductor manufacturing apparatuses configured to perform a same manufacturing function;
• a plurality of apparatus controllers configured to individually control said semiconductor manufacturing apparatuses;
• and
• a group controller commonly connected to said apparatus controllers so as to control said semiconductor manufacturing apparatuses via said apparatus controllers, said group controller comprising a storage device configured to store process recipes corresponding to said manufacturing function and used by said semiconducting manufacturing apparatuses,
• wherein
• said group controller writes and reads out a recipe in and from said storage device, writes in a recipe history in said storage device, and operates said semiconductor manufacturing apparatuses based on the process recipes read out from said storage.

A system for applying process recipes in association with a host computer, comprising:

• a plurality of semiconductor manufacturing apparatuses configured to perform a same manufacturing function;
• a plurality of apparatus controllers configured to individually control said semiconductor manufacturing apparatuses and having display screens;
• and
• a group controller commonly connected to said apparatus controllers through a channel different from channels which connect said apparatus controllers to said host computer, said group controller being connected to said host computer through a dedicated channel to directly exchange information with said host computer,
• wherein said apparatus controllers each have means for receiving process recipes sent from said host computer,
• said group controller writes and reads out the process recipes in and from said host computer through the dedicated channel, writes in a recipe history in said host computer through the dedicated channel, and respectively operates said semiconductor manufacturing apparatuses based on the process recipes sent from said host computer, and
• said group controller stores a history of a process recipe used by said semiconductor manufacturing apparatuses and comprises selection means capable of selecting one of the following mode:
• a. an apparatus mode in which process recipes are stored in said apparatus controllers, and an operator selects a recipe to be executed from the process recipes displayed on the display screen of an apparatus controller to be operated by said operator;
• b. a recipe management mode in which process recipes are stored in said group controller, and a recipe to be executed in selected by designating an execution recipe for said host computer;
• and
• c. a host mode in which process recipes are stored in said host computer, and said host computer sends a process recipe to said apparatus controllers, writes/reads out a recipe in/from said group controller through the dedicated channel, and reads out a recipe history from the group controller through the dedicated channel.