US 5,998,066 A · Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Abstract

A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist film on an inorganic substrate. The selenium germanium photoresist film may then transfer the gray scale to the substrate.

Claims19

Dependent claims

A method comprising:

producing a gray scale mask, said step of producing comprising:
depositing a chalcogenide glass on a first substrate;
depositing a layer containing silver on said chalcogenide glass;
irradiating said layer containing silver in a gray scale pattern such that silver is diffused into said chalcogenide glass in said gray scale pattern;
etching said layer containing silver in an acid solution wherein the removal of silver uncovers said chalcogenide glass and the silver diffused into said chalcogenide glass is not removed;
and
etching the uncovered chalcogenide glass in an alkaline solution, wherein a layer of silver-diffused chalcogenide glass remains on said first substrate representing said gray scale pattern.

4 more elements

A method comprising:

producing a gray scale mask, said step of producing comprising:
depositing a chalcogenide glass on a first substrate;
irradiating said chalcogenide glass in a gray scale pattern;
and
etching said chalcogenide glass in an alkaline aqueous solution until the irradiated chalcogenide glass in said gray scale pattern is dissolved leaving a layer of chalcogenide glass on said first substrate representing said gray scale pattern.

2 more elements

Dependencies are inferred from the claim text.

Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Life of this patent

Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Life of this patent

Abstract

Claims19